| 新型Nano-CMM二维定位平台研究 |
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| 引用本文： | 奚琳,余晓芬,范伟. 新型Nano-CMM二维定位平台研究[J]. 合肥工业大学学报(自然科学版), 2006, 29(12): 1605-1608 |
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| 作者姓名： | 奚琳 余晓芬 范伟 |
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| 作者单位： | 合肥工业大学,仪器科学与光电工程学院,安徽,合肥,230009 |
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| 基金项目： | 国家自然科学基金 , 安徽省重点实验室基金 |
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| 摘 要： | 介绍了一种新型纳米三坐标测量机二维定位平台的结构设计:平台设计了无爬行的磁浮-滑动复合导轨;引入了“共平面“的导向模式,实现近零阿贝误差;并对二维定位平台力平衡和系统热效应作了优化设计。计算和实验结果表明,平台能有效解决低速驱动时的爬行问题,实现微小步距进给,满足微纳米级定位平台的要求。
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| 关 键 词： | 纳米二维定位平台 磁浮式 共平面 阿贝误差 力平衡 |
| 文章编号： | 1003-5060(2006)12-1605-04 |
| 修稿时间： | 2006-10-10 |
Research on the two-coordinate platform of novel Nano-CMM |
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| XI Lin,YU Xiao-fen,FAN Wei. Research on the two-coordinate platform of novel Nano-CMM[J]. Journal of Hefei University of Technology(Natural Science), 2006, 29(12): 1605-1608 |
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| Authors: | XI Lin YU Xiao-fen FAN Wei |
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| Abstract: | This paper introduces a kind of two-coordinate platform of novel coordinate measuring machines(CMM) with nanometer resolution.The magnetic suspension rail without creep is designed."The same plane" oriented mode is adopted and the result shows that the Abbe error is decreased to almost zero.Also improved are the designs of force balance and the heat system of the two-coordinate platform.Calculations and experiment results show that creep is solved when the platform is driven slowly and the tiny moving step is realized,thus meeting the requirements of nano-platforms. |
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| Keywords: | two-coordinate platform magnetic suspension the same plane Abbe error force balance |
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