变包含角平面光栅单色器及其关键技术

分析设计并研制了上海光源软X 射线谱学显微光束线站的变包含角平面光栅单色器, 经过精密加工调试, 保证了扫描系统的转角重复精度; 采用多孔腔内部通道水冷方法, 控制了镜子表面热变形; 完成真空箱体大尺寸方法兰加工与密封, 达到了单色器工作所需的超高真空. 通过上述关键部件的精确掌控, 确保了单色器主要性能——光子能量范围、能量分辨率和能量重复性, 均优于设计指标.

The variable included angle plane grating monochromator and the key technology

This article discusses the design of a variable included angle plane grating monochromator (VAPGM) on the soft X-ray spectromicroscopy beam-line at Shanghai Synchrotron Radiation Facility (SSRF). The precision scanning system of sin-bar meets the requirements through resolving the high precision repeatability of mechanical transmission system; the inner path water cooling structure of the plane mirror controls the thermal deformation of the mirror surface; the huge dimension and quadrate flange chamber ensures the ultra high vacuum (UHV) which the VAPGM requires. Finally, the main capabilities of the monochromator, including the energy range, energy resolution and energy repeatability, reach the design requirements completely.