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A theoretical model of electrostatic ultrasonic transducers with micro air-gap structure |
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| Authors: | Lifeng Ge |
| Institution: | (1) Department of Physics, Anhui University, 230039 Hefei, China |
| Abstract: | A new plate-on-air-spring model (or called short tube or DK model) for modelling the behaviour of electrostatic air-cuupled ultrasonic transducers is developed and verified by accurate predictions of natural frequencies of a typical transducer with V-grooved backplate. |
| Keywords: | electrostatic ultrasonic transducer micro air-gap structure modelling |
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