| 离子镀装饰膜厚度测量技术 |
| |
| 引用本文： | 杨建宏,闫进. 离子镀装饰膜厚度测量技术[J]. 太原科技大学学报, 1996, 0(1) |
| |
| 作者姓名： | 杨建宏 闫进 |
| |
| 作者单位： | 太原重型机械学院基础部 |
| |
| 摘 要： | 本文首次利用Ｍｉｃｈｅｌｓｏｎ干涉仪对多弧离子镀ＴＩＮ装饰膜厚度进行了精确测量，该方法原理简单，测量精度高、可重复性强．是装饰膜厚度测量的最佳方法．
|
| 关 键 词： | 薄膜厚度测量；迈克尔逊干涉仪 |
Technology of the Thickness Measurement of the Ion Plating Decorative Film |
| |
| Yang Jianhong, Yan Jin. Technology of the Thickness Measurement of the Ion Plating Decorative Film[J]. Journal of Taiyuan University of Science and Technology, 1996, 0(1) |
| |
| Authors: | Yang Jianhong Yan Jin |
| |
| Abstract: | in this Paper,Michelson interferometer is used tO measure the thickness of TiN decorative film precisely(which is made by Multi-arc ion plating)for the first time. This methed has such advantages as high precision in measurement, Simplicity in principles and being strong in repesting. It will be the best way to measure the thickness of the decorative film. |
| |
| Keywords: | thin film thickness measure ment michelson inter ferometer |
| 本文献已被 CNKI 等数据库收录！ |
