| 钕、镧掺杂氧化锌薄膜的制备及形貌 |
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| 引用本文： | 文军.钕、镧掺杂氧化锌薄膜的制备及形貌[J].河北师范大学学报(自然科学版),2009,33(5). |
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| 作者姓名： | 文军 |
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| 作者单位： | 渭南师范学院,物理与电子工程系,陕西,渭南,714000 |
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| 基金项目： | 陕西省教育厅科研计划，渭南师范学院科研基金 |
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| 摘 要： | 通过射频磁控溅射技术在Si(111)衬底上制备了Nd,La掺杂的ZnO薄膜.应用XRD分析了所制备薄膜的微结构,Nd,La掺入了ZnO晶格,没有改变ZnO薄膜的结构,薄膜为沿(100),(101)方向生长的纳米多晶结构.通过AFM观测与分析表明,Nd,La掺杂ZnO薄膜的表面形貌粗糙,呈现拱形.Nd3+离子与La3+离子4f轨道上电子数不同可能是Nd,La掺杂ZnO薄膜生长差异的主要原因.
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| 关 键 词： | ZnO薄膜 钕掺杂 镧掺杂 |
Investigation of Structure of Nd-doped ZnO and La-doped ZnO Thin Films |
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| WEN Jun.Investigation of Structure of Nd-doped ZnO and La-doped ZnO Thin Films[J].Journal of Hebei Normal University,2009,33(5). |
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| Authors: | WEN Jun |
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| Institution: | Department of Physics and Electronic Engineering;Weinan Teachers University;Shaanxi Weinan 714000;China |
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| Abstract: | The Nd-doped and La-doped ZnO thin films were deposited on Si(111) substrate by radio frequency magnetron sputtering.The lattice structure and the surface morphology were analyzed by X-ray diffraction and atomic force microscope respectively.The results indicated that lattice structure of the thin films was not disturbed by Nd-doping and La-doped.The thin films were nano-multi-crystal which had(100),(101) orientation and the surface morphology were roughness since the deformation of Nd-doped and La-doped.Du... |
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| Keywords: | XRD AFM |
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