| SrTiO_3薄膜的掠入射X射线衍射研究 |
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| 引用本文： | 翟章印. SrTiO_3薄膜的掠入射X射线衍射研究[J]. 淮阴师范学院学报(自然科学版), 2011, 10(1) |
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| 作者姓名： | 翟章印 |
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| 作者单位： | 淮阴师范学院物理与电子电气工程学院,江苏,淮安,223300 |
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| 基金项目： | 国家自然科学基金资助项目,淮阴师范学院青年优秀人才支持计划项目 |
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| 摘 要： | 采用掠入射X射线衍射技术研究了外延SrTiO3薄膜面内晶格应变随着深度的分布.研究发现不管是较薄的还是较厚的薄膜其面内晶格应变随深度的分布都不是连续变化的,而是可以分为三个区域,即表面区、应变驰豫区、界面区.
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| 关 键 词： | 掠入射X射线衍射 面内晶格参数 应变深度分布 |
The Grazing Incidence X-ray Diffraction Investigation of SrTiO_3 Thin Films |
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| ZHAI Zhang-yin. The Grazing Incidence X-ray Diffraction Investigation of SrTiO_3 Thin Films[J]. Journal of Huaiyin Teachers College(Natrual Science Edition), 2011, 10(1) |
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| Authors: | ZHAI Zhang-yin |
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| Affiliation: | ZHAI Zhang-yin(School of Physics and Electronic and Electrical Engineering,Huaiyin Normal University,Huaian Jiangsu 223300,China) |
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| Abstract: | The grazing incidence X-ray diffraction technology was adopted to investigate the distribution of the in plain lattice strain dependence of depth for SrTiO3 thin films.We find that not for the thiner not the thicker films,the in plain lattice strain dependence of depth is linear,but can be divided into three areas: surface area,strain relaxiation area,and interface area. |
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| Keywords: | grazing incidence X-ray diffraction plain lattice parameters plain lattice strain dependence of depth |
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