电容式传感器的设计方法探讨

研究者从间距变化型电容传感器的工作原理出发，从检测原理、参数分析和主要误差来源等方面对差分式电容传感器系统的设计方案进行了研究。分析结果表明差动式电容传感器的灵敏度比一般电容传感器提高了一倍，同时差动式电容传感器的非线性误差得到了明显的改善。电容传感器的主要误差来源于电路噪声和电容传感器的非线性。

Discussion on Designing Methods of Capacitive Sensors

Starting from the operational principle of the pitch-change type capacitive sensors, the researcher mainly discusses the design scheme of the capacitive sensor system from deception principle, parametric analysis and the source of main errors. The results shw that the sensitivity of the differential capacitive sensors is twice of the sensitivity of the normal capacitive sensors, and the non-linear error of the former has been significantly improved. The source of the main error of the capacitive sensors comes from the circuit noise and the non-linear of the capacitive sensors.