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| 涂层密封微电子元件的无损显露 | |
| 引用本文： | 李素清 ,许绍权.涂层密封微电子元件的无损显露[J].华南师范大学学报(自然科学版),1987,0(1):1. |
| 作者姓名： | 李素清 许绍权 |
| 摘 要： | 本文简略报道了为消溶微电子元件密封涂层而合成的SQ—86制剂.用此制剂能成功地将微电子元件的密封涂层脱除.本文同时讨论了消溶的最优条件. |
| 关 键 词： | SQ-制剂 涂层 消溶 微电子元件 |
SOLUTION OF THE PAINTCOAT ON MICROELECTRONIC ELEMENT |
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| Li Suqing Xu Shaoquan.SOLUTION OF THE PAINTCOAT ON MICROELECTRONIC ELEMENT[J].Journal of South China Normal University(Natural Science Edition),1987,0(1):1. | |
| Authors: | Li Suqing Xu Shaoquan |
| Institution: | Li Suqing Xu Shaoquan |
| Abstract: | An agent, SQ-86, was synthesized to solve the paintcoat on microelectronic elements and; as a result, a microelectronic element without a paintcoat has been obtained. The optimun solving conditons are also discussed. |
| Keywords: | SQ-86 agent paintcoat solution of the paintcoat microelectronic element |
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