| 基于Petri网的半导体晶圆制造系统建模与分析 |
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| 引用本文： | 邵志芳,钱省三. 基于Petri网的半导体晶圆制造系统建模与分析[J]. 系统管理学报, 2004, 13(2): 177-181 |
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| 作者姓名： | 邵志芳 钱省三 |
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| 作者单位： | 上海理工大学,工业工程研究所/微电子发展研究中心,上海,200093 |
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| 摘 要： | 晶圆制造生产线由于存在回流、并发、资源共享、随机性的重做以及突发性设备故障等现象,使得生产管理及调度问题变得极为复杂。建立描述系统的模型是优化系统性能的前提,指出了用Petri网建立晶圆制造系统模型的优点,建立了一个拥有4个工作中心、8台设备的晶圆制造系统Petri网模型,并对模型进行分析。最后提出了下一步的工作目标。
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| 关 键 词： | 半导体晶圆制造 Petri网模型 分析 |
| 文章编号： | 1005-2542(2004)02-0177-05 |
| 修稿时间： | 2002-12-30 |
Petri Net-Based Modeling and Analysis for Semiconductor Wafer Fabrication System |
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| SHAO Zhi-fang,QIAN Xing-san. Petri Net-Based Modeling and Analysis for Semiconductor Wafer Fabrication System[J]. Systems Engineering Theory·Methodology·Applications, 2004, 13(2): 177-181 |
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| Authors: | SHAO Zhi-fang QIAN Xing-san |
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| Abstract: | There are re-entrant, concurrence, resource sharing, stochastic rework and unpredicted machine beakdown in semiconductor wafer fabrication line, which make the fab management and scheduling more complex. Modeling the system is a premise work to optimize the properties of the system, in this paper, the advantages of using Petri net modeling the system are pointed out. Then, a Petri net model representing a re-entrant line with four work centers and eight machines is presented, and the analysis for this model is provided. At the end, the aim of next-step work is put forward. |
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| Keywords: | semiconductor wafer fabrication Petri net(PN) models analysis |
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