| 磁悬浮转子微陀螺悬浮线圈的结构设计 |
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| 引用本文： | 吴校生,陈文元,赵小林,李振波,张卫平,崔峰,何淼.磁悬浮转子微陀螺悬浮线圈的结构设计[J].上海交通大学学报,2005,39(1):125-128. |
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| 作者姓名： | 吴校生 陈文元 赵小林 李振波 张卫平 崔峰 何淼 |
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| 作者单位： | 上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030;上海交通大学,微纳米科学技术研究院,薄膜与微细加工技术教育部重点实验室,上海,200030 |
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| 基金项目： | 国家高技术研究发展计划(863)项目(2002AA745120),上海市科委2002年重大项目"微机电系统"资助 |
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| 摘 要： | 在磁悬浮转子微陀螺(MGELR)中,悬浮线圈是定子线圈的重要组成部分,它产生的电磁力将微转子浮起．基于多圈螺旋型悬浮线圈新型结构能产生较大的悬浮力,应用有限元方法对其进行建模仿真,研究了线圈的圈数、厚度和内径对悬浮力的影响规律．结果表明：随着悬浮线圈的圈数增多,悬浮力增大且幅度增加;线圈厚度增加,悬浮力减小;随着悬浮线圈内径增加,悬浮力呈线性增加．采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子．初步的实验结果验证了该设计方案是可行的．
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| 关 键 词： | 磁悬浮 微陀螺 线圈 微细加工 |
| 文章编号： | 1006-2467(2005)01-0125-04 |
| 修稿时间： | 2003年12月3日 |
Structure Design of Levitating Coil in Micromachined Gyroscope with an Electromagnetic Levitated Rotor |
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| WU Xiao-sheng,CHEN Wen-yuan,ZHAO Xiao-lin,LI Zhen-bo,ZHANG Wei-ping,CUI Feng,HE Miao Microfabrication of Ministry of Education,Shanghai Jiaotong Univ.,Shanghai ,China.Structure Design of Levitating Coil in Micromachined Gyroscope with an Electromagnetic Levitated Rotor[J].Journal of Shanghai Jiaotong University,2005,39(1):125-128. |
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| Authors: | WU Xiao-sheng CHEN Wen-yuan ZHAO Xiao-lin LI Zhen-bo ZHANG Wei-ping CUI Feng HE Miao Microfabrication of Ministry of Education Shanghai Jiaotong Univ Shanghai China |
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| Institution: | WU Xiao-sheng,CHEN Wen-yuan,ZHAO Xiao-lin,LI Zhen-bo,ZHANG Wei-ping,CUI Feng,HE Miao Microfabrication of Ministry of Education,Shanghai Jiaotong Univ.,Shanghai 200030,China) |
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| Abstract: | The micromachined gyroscope with an electromagnetic levitated rotor (MGELR) was modeled and analyzed using finite element, and the influence of loop number, depth and inner diameter of levitation coil on levitating force was obtained. With the increase of the loop number of levitation coil, the levitating force increases more quickly. The levitating force decreases with the increase of the depth of coil. The levitating force increases linearly with the increase of the inner diameter of levitation coil. The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR. The result of preliminary experiment shows that the design scheme of MGELR is feasible. The multi-loop levitation coil structure was adopted and the influencing factor of levitating force was analyzed systematically. |
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| Keywords: | electromagnetic levitation micromachined gyroscope coil micromachining |
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