| MEMS磁场传感器的设计及测试 |
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| 引用本文： | 陈洁,秦明,黄庆安. MEMS磁场传感器的设计及测试[J]. 东南大学学报(自然科学版), 2011, 41(5): 929-933. DOI: 10.3969/j.issn.1001-0505.2011.05.007 |
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| 作者姓名： | 陈洁 秦明 黄庆安 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,南京,210096 |
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| 基金项目： | 国家自然科学基金资助项目(61076071) |
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| 摘 要： | 以U型梁为主要结构设计了一种新型的洛伦兹力驱动的磁场传感器,检测在磁场中作切割磁力线运动的金属线上的感生电压,实现磁场测量.首先介绍了传感器的工作原理,并用振动理论对传感器的受力及响应进行了分析,接着用有限元软件建立结构模型并对其振动模态和频率进行了仿真.该MEMS磁场传感器采用标准的CMOS工艺加上后处理来实现.最后...
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| 关 键 词： | 磁场传感器 MEMS 洛仑兹力 谐振 |
Design and experiment of MEMS magnetic sensor |
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| Chen Jie,Qin Ming,Huang Qing'an. Design and experiment of MEMS magnetic sensor[J]. Journal of Southeast University(Natural Science Edition), 2011, 41(5): 929-933. DOI: 10.3969/j.issn.1001-0505.2011.05.007 |
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| Authors: | Chen Jie Qin Ming Huang Qing'an |
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| Affiliation: | Chen Jie Qin Ming Huang Qing'an(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) |
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| Abstract: | A new sensor of measuring magnetic field using a U-shaped beam driven by Lorentz force is presented.The magnetic field is obtained by measuring the induced electromotive voltage of the coil of the mechanical structure.The theoretical model and the response of the sensor are analyzed using the vibration theory.The resonance frequencies and modes of the resonators are simulated by the general purpose finite element program ANSYS.These micro-electro-mechanical systems(MEMS) devices are realized through a stand... |
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| Keywords: | magnetic sensor micro-electro-mechanical systems(MEMS) Lorentz force resonate |
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