| 硅单晶微缺陷的激光荧光显示 |
| |
| 引用本文： | 宗祥福,翁渝民,胡鑫根.硅单晶微缺陷的激光荧光显示[J].复旦学报(自然科学版),1987(3). |
| |
| 作者姓名： | 宗祥福 翁渝民 胡鑫根 |
| |
| 作者单位： | 复旦大学材料科学研究所
(宗祥福，翁渝民)，复旦大学材料科学研究所(胡鑫根) |
| |
| 摘 要： | 用室温激光荧光显微技术直接观察了硅单晶中的微缺陷,获得了能与择优腐蚀相对应的微缺陷形貌图.实验表明,激光荧光显微可望发展成为一种无接触、非破坏、高灵敏的硅中微缺陷的显示技术.
|
| 关 键 词： | 激光荧光 微缺陷 |
MICRO-DEFECTS IN SILICON CRYSTAL BY LASER-FLUORESCENCE |
| |
| Zong Xiangfu,Wong Yuming,Hu Xin-geng.MICRO-DEFECTS IN SILICON CRYSTAL BY LASER-FLUORESCENCE[J].Journal of Fudan University(Natural Science),1987(3). |
| |
| Authors: | Zong Xiangfu Wong Yuming Hu Xin-geng |
| |
| Institution: | Institute of Materials Science |
| |
| Abstract: | By use of the room-temperature laser-fluorescence microscopic technology, the micro-defects of silicon was observed. The morpology which was obtained by above technology coincide with the figure which was obtained by preferential etching. These results proved that laserfluorescence microscopic technology will be a non-contactive, non-destructive and very sensitive method for the defect monitory in silicon. |
| |
| Keywords: | laser-fluorescence micro-defects |
| 本文献已被 CNKI 等数据库收录！ |
