| 提高扫描电镜观测性能的几种方法 |
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| 引用本文： | 冯穗力,张凌.提高扫描电镜观测性能的几种方法[J].华南理工大学学报(自然科学版),1991,19(4):1-9. |
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| 作者姓名： | 冯穗力 张凌 |
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| 作者单位： | 华南理工大学无线电工程系，华南理工大学无线电工程系，华南理工大学无线电工程系，华南理工大学无线电工程系 |
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| 摘 要： | 为提高现有大量扫描电子显微镜(SEM)的观测性能,需为其配备具有特定功能的图象处理系统,本文主要研究了设计该系统时有关实时降噪处理、扫速转换、彩色变换等方面的关键技术和具体的实现方法。
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| 关 键 词： | 扫描电镜 实时 降噪 图象处理 SEM |
METHODS OF IMPROVING THE PERFORMANCE OF EXISTING SCANNING ELECTRON MICROSCOPES |
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| Feng Suili,Zhang Ling,Qui Heng and Ye Wu Dept.of Radio Eng.South China Univ.of Tech..METHODS OF IMPROVING THE PERFORMANCE OF EXISTING SCANNING ELECTRON MICROSCOPES[J].Journal of South China University of Technology(Natural Science Edition),1991,19(4):1-9. |
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| Authors: | Feng Suili Zhang Ling Qui Heng and Ye Wu Deptof Radio EngSouth China Univof Tech |
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| Institution: | Feng Suili;Zhang Ling;Qui Heng and Ye Wu Dept.of Radio Eng.South China Univ.of Tech. |
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| Abstract: | In order to improve the performance of existing scanning electron mieroscopes(SEM),it is necessary to equip them with an extra image processing system.In this paper,key techniques of the SEM image processing system.such as real time recurrence filtering, transformation of scanning rate,pseudo-coloring and their hard- ware configuration are studied. |
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| Keywords: | SEM real time noise reduction image processing |
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