| 钛等离子渗氧研究 |
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| 引用本文： | 郑传林,徐重,谢锡善,贺志勇,董建新.钛等离子渗氧研究[J].北京科技大学学报,2002,24(1):44-46. |
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| 作者姓名： | 郑传林 徐重 谢锡善 贺志勇 董建新 |
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| 作者单位： | 1. 北京科技大学材料科学与工程学院,北京,100083;2. 太原理工大学表面工程研究所,太原,030024 |
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| 基金项目： | 国家高技术研究发展计划(863计划);7150080050; |
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| 摘 要： | 为了提高钛表面硬度和耐磨性,采用辉光放电等离子渗氧技术对钛进行表面处理.结果表明,渗氧层厚度与氧分压、温度和时间呈明显的对应关系.特别是,在空心阴极辉光放电条件下,离子轰击会加强氧的离子化,促进渗氧,有助于低价态氧化物的形成.在表层所形成的TiO其硬度达到或接近TiN的硬度水平.
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| 关 键 词： | 辉光放电 离子轰击 渗氧硬化 |
| 修稿时间： | 2001年3月27日 |
Study on Plasma Oxygen Permeation of Titanium |
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| ZHENG Chuanlin,XU Zhong,XIE Xishan,HE Zhiyong,DONG Jianxin.Study on Plasma Oxygen Permeation of Titanium[J].Journal of University of Science and Technology Beijing,2002,24(1):44-46. |
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| Authors: | ZHENG Chuanlin XU Zhong XIE Xishan HE Zhiyong DONG Jianxin |
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| Abstract: | Titanium surface treatment has been carried out by using glow plasma oxygenizing for impro- ving the hardness and wear resistance. The results indicate that there exist a certain realationship beetween the thickness of the oxidation layer and the oxygen partial pressure,temprature and time. Especially in the condi- tion of hollow cathode dischage, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of Ti. The hardness of TiO formed on the titanium substrate approachs that of TiN. |
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| Keywords: | glow discharge ion bombardment oxygen permeation hardening |
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