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| 硅各向异性腐蚀技术 | |
| 引用本文： | 王丰,吕平临,李敬文. 硅各向异性腐蚀技术[J]. 哈尔滨商业大学学报(自然科学版), 2000, 16(2): 22-27 |
| 作者姓名： | 王丰 吕平临 李敬文 |
| 作者单位： | 1. 黑龙江商学院电子工程系,黑龙江哈尔滨,150076 2. 黑龙江计算机总公司,黑龙江哈尔滨,150001 3. 黑龙江省计划生育信息中心,黑龙江哈尔滨,150001 |
| 摘 要： | 论述了硅各向异性腐蚀技术在国内外的水平和友展趋势，攻关成果的推广应用前景。 |
| 关 键 词： | 硅各向异性腐蚀 硅杯结构 推广应用 |
| 修稿时间： | 1999-10-17 |
Brief Discussion on the Technique of Different Erosion in Different Direction of Sillicon |
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| Wang Feng,Lu Ping-lin,Li Jing-wen. Brief Discussion on the Technique of Different Erosion in Different Direction of Sillicon[J]. Journal of Harbin University of Commerce :Natural Sciences Edition, 2000, 16(2): 22-27 | |
| Authors: | Wang Feng Lu Ping-lin Li Jing-wen |
| Abstract: | This paper discusses the significance of the technique of different erosion indifferent drection of sillicon, the development leve and the trend of this technique, and theapplication of this thchnique. |
| Keywords: | different erosion in different direction of sillicon structure of sillicon cup application on the technique |
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