| 光滑曲面的硅微透镜列阵形成机理研究 |
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| 引用本文： | 朱维安,池凌飞. 光滑曲面的硅微透镜列阵形成机理研究[J]. 汕头大学学报(自然科学版), 2002, 17(1): 27-31 |
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| 作者姓名： | 朱维安 池凌飞 |
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| 作者单位： | 汕头大学物理学系,汕头,515063 |
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| 摘 要： | 采用碱性腐蚀的典型微机械加工法 ,制备出了光滑曲面的硅微透镜列阵 ,对试验样品进行了轮廓曲线测试 ,计算出了该腐蚀工艺的快腐蚀面 .重点研究了微透镜列阵凹面的形成机理 ,提出了与试验测试结果相吻合的解释模型 .该模型对微光学透镜的设计加工具有重要指导意义 .
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| 关 键 词： | 微光学透镜 台阶测试 硅碱性腐蚀 形成机理 |
| 文章编号： | 1001-4217(2002)01-0027-05 |
| 修稿时间： | 2001-06-26 |
Studies on the Formation Mechanism of Silicon Micromirror Array with Smooth Curved Surface Manufactured by Micromechanical Process |
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| Zhu Weian Chi Lingfei. Studies on the Formation Mechanism of Silicon Micromirror Array with Smooth Curved Surface Manufactured by Micromechanical Process[J]. Journal of Shantou University(Natural Science Edition), 2002, 17(1): 27-31 |
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| Authors: | Zhu Weian Chi Lingfei |
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| Abstract: | The typical micromechanical process by means of alkaline etching was adopted to manufacture silicon micromirror array with smooth curved surface,and profilographic tests were conducted on samples to calculate the rapid etched surfaces formed in the process.Investigations were made into the formation mechanism of the true concave surfaces to form an interpretative model which is in good agreement with the experimental results and which is of great significance for the design and manufacture of microoptical lens. |
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| Keywords: | microoptical lens profile measurement silicon alkaline etching formation mechanism |
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