| 离子轰击温升测量误差分析 |
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| 引用本文： | 赵云飞,赵旭华.离子轰击温升测量误差分析[J].东北大学学报(自然科学版),1994,15(6):632-636. |
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| 作者姓名： | 赵云飞 赵旭华 |
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| 作者单位： | 东北大学，辽宁省仪器仪表公司 |
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| 摘 要： | 用非晶带温升晶化记录法和铂薄膜热电阻温度计分别测量了镀一层铝薄膜的非晶带在氩离子束轰击下引起的温升与轰击束流功率密度的关系。误差分析表明，薄膜温度计测量的系统误差小，但其方法误差很大；非晶记录法相比之下测量绝对误差较小。从热力学稳态能量守恒出发，给出了Ｐ－Ｔ关系式的近似表达式。
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| 关 键 词： | 离子轰击 薄膜 电阻 误差 温度 测量 |
Measurement Error Analysis of Temperature Rising due to Ion-Bombardment |
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| Zhao Yunfei,Sun Suzi,Zhao Xuhua.Measurement Error Analysis of Temperature Rising due to Ion-Bombardment[J].Journal of Northeastern University(Natural Science),1994,15(6):632-636. |
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| Authors: | Zhao Yunfei Sun Suzi Zhao Xuhua |
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| Institution: | Zhao Yunfei;Sun Suzi;Zhao Xuhua |
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| Abstract: | Temperature rising in non-crystal strips with thin Al coating due to argon ion-beam bombardment was measured by both Pt-100 thermometer and the method of crystallization. Error analysis shows thatthe results measured by the method of crystallization are closer to the real temperature than those measuredby Pt thin film element.Viewing from the conservation of energy in thermal stable state,a semi-theoretical equation is presented. |
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| Keywords: | ion bombardment temperature measurement non-crystal strip thin film element error analysis |
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