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用磁控溅射法制作电磁波屏蔽复合材料
引用本文:李文明,张丽芳,刘金玲,任宝林,石殿普. 用磁控溅射法制作电磁波屏蔽复合材料[J]. 吉林大学学报(理学版), 1996, 0(3)
作者姓名:李文明  张丽芳  刘金玲  任宝林  石殿普
作者单位:吉林大学材料科学系
摘    要:阐述了用磁控溅射法制作电磁波屏蔽复合材料的工艺过程,对所制作的材料进行了屏蔽性能的测试和理论分析,给出了屏蔽效果与材料结构、膜厚等关系的定量说明.

关 键 词:电磁屏蔽,复合材料,磁控溅射

Composite Material for Shielding Electro-magnetic Wave Prepared by Means of Magnetron Controlling Sputter
Li Wenming, Zhang Lifang, Liu Jiming, Ren Baolin,Shi Dianpu. Composite Material for Shielding Electro-magnetic Wave Prepared by Means of Magnetron Controlling Sputter[J]. Journal of Jilin University: Sci Ed, 1996, 0(3)
Authors:Li Wenming   Zhang Lifang   Liu Jiming   Ren Baolin  Shi Dianpu
Abstract:The processing for preparing composite materials for shielding electro-magnetic wave is described in detail. The shielding effect was tested and analysed. The relationship between shielding efficiency and the material structure or film thickness was obtained in quantity. The material was prepared by means of magnetron control sputter.
Keywords:electro-magnetic shielding   composite material   magnetron control sputter  
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