Detection of coaxial backscattered electrons in SEM

We present a coaxial detection of the backscattered electrons in SEM. The lens-aperture has been used to filter in energy and focus the backscattered electrons. This particular geometry allows us to eliminate the low energy backscattered electrons and collect the backscattered electrons, which are backscattered close to the incident beam orientation. The main advantage of this geometry is adapted to topographic contrast attenuation and atomic number contrast enhancement. Thus this new SEM is very suitable to analyze the material composition. Foundation item: Supported by the National Natural Science Foundation of China (10045001) Biography: JIANG Chang-zhong (1962-), male, Ph. D, Associate professor.