低温等离子体在材料表面改性中的应用

概要介绍了目前低温等离子体在材料表面改性方面的研究进展。材料的许多特性，如金属的表面硬度、耐腐蚀、耐磨擦，聚合物的表面浸润性、亲性性、粘附性以及生物功能材料的生物相容性等，决定了材料的应用。低温等离子体并不改变材料的板材特性而仅影响材料的表面特性。对金属如不锈钢等用氮气等离子源离子注入，可以在表面形成Fe2N,Fe3N和Fe4N的铁的氮化物，提高表面的硬度和耐腐蚀性能；氧气、氮气等离子体会在聚合物材料表面形成微针孔结构，改善其浸润性、粘附性；用等离子聚合法在生物材料表面聚合高分子材料，如氧化对二甲苯可以降低血小板的吸附。因此，低温等离子体在材料的表面改性方面有很好的应用前景。

Application of Cold Plasma in Surface Modification

This paper briefly reviews the research state of surface modification with cold plasma. Many properties of materials like microhardness, corrosion resistance, and tribological properties of metal, wettability, hydrophilicity, and adhesion of polymer and biomaterials' biocompatibility, often determine their application. The cold plasma can only influence material's surface properties, but cannot change its bulk property. For example, to metal like stainless steel,N 2 ion source ion implantation can form iron's nitrides like Fe 2N,Fe 3 and Fe 4N which can improve its microhardness and corrosion resistance; O 2, N 2 plasma can induce the formation of micro pinhole on the surface of polymer materials, that improves their wettability and adhesion properties. The high molecular material like poly(2 chloro paraxylyylene) polymerized on biomaterials using plasma polymerization can reduce the adsorption of blood platelet. Therefore cold plasma has a good foreground at the modification of materials.