| 半导体制造中具有非重入过程的自动组合装置的性能分析 |
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| 引用本文： | 白丽平,伍乃骐.半导体制造中具有非重入过程的自动组合装置的性能分析[J].系统工程理论与实践,2005,25(6):11-18. |
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| 作者姓名： | 白丽平 伍乃骐 |
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| 作者单位： | 广东工业大学机电工程学院 |
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| 基金项目： | 广东省自然科学基金团队项目(20003051) |
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| 摘 要： | 将面向资源的着色、赋时Petri网(coloredtimedresource orientedPetrinet,CTROPN)用于半导体制造业中自动组合装置的建模.CTROPN具有较强的建模能力,能够准确描述自动组合装置的加工过程.借助该模型,对非重入加工过程的初始特性、稳态特性和结束特性进行详细的分析.
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| 关 键 词： | 自动组合装置 Petri网 建模 非重入过程 |
| 文章编号： | 1000-6788(2005)06-0011-08 |
| 修稿时间： | 2004年5月31日 |
Performance Analysis of Cluster Tool with Non-Revisiting in Semiconductor Manufacturing |
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| BAI Li-ping,WU Nai-qi.Performance Analysis of Cluster Tool with Non-Revisiting in Semiconductor Manufacturing[J].Systems Engineering —Theory & Practice,2005,25(6):11-18. |
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| Authors: | BAI Li-ping WU Nai-qi |
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| Institution: | Dept of Mechatronics Engineering, Guangdong Univ of Technology |
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| Abstract: | A colored timed resource-oriented Petri net (CTROPN) is powerful tool to simulate the systems' resource distribution. It is developed to model the cluster tools in semiconductor manufacturing. Since each module in a cluster tool corresponds an unique place p in CTROPN, it is structurally simple and concise. Through modeling the qualitative and temporal behavior of the cluster tools with non-revisiting. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model. |
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| Keywords: | cluster tool Petri net modeling process with non-revisiting |
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