| WO3基H2S气体传感器的研究 |
| |
| 引用本文： | 吴正元,陈涛,丘思畴,吴正华.WO3基H2S气体传感器的研究[J].华中科技大学学报(自然科学版),1999,27(1). |
| |
| 作者姓名： | 吴正元 陈涛 丘思畴 吴正华 |
| |
| 作者单位： | 华中理工大学电子科学与技术系 |
| |
| 摘 要： | 介绍了电子束蒸发ＷＯ３膜和以该膜为敏感材料的Ｈ２Ｓ气体传感器工艺，分析了膜的灵敏度和膜的稳定性以及掺金和分步热处理对器件性能的影响
|
| 关 键 词： | WO3膜 掺金 H2S气敏元件 电子束蒸发 |
A Study of WO3 Based H2S Gas Sensors |
| |
| Wu Zhengyuan,Chen Tao,Qiu Sichou,Wu Zhenghua.A Study of WO3 Based H2S Gas Sensors[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1999,27(1). |
| |
| Authors: | Wu Zhengyuan Chen Tao Qiu Sichou Wu Zhenghua |
| |
| Institution: | Wu Zhengyuan Chen Tao Qiu Sichou Wu Zhenghua |
| |
| Abstract: | Using electron beam evaporation on ceramic substrate of Al 2O 3, tungsten oxide films were prepared and H 2S gas sensors with the films were made. Electron beam evaporation, gold doping and step heat treatment were used in order to obtain better sensitivity, stability and selectivity in the films. The sensing mechanisms of tungsten oxide films were also discussed. |
| |
| Keywords: | tungsten oxide films gold doping H 2S gas sensors electron beam evaporation |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
