| Sol-甩膜法制备钛酸钡薄膜及其微观形态的SPM研究 |
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| 引用本文： | 申玉双,杨芙丽,许新芳,翟学良.Sol-甩膜法制备钛酸钡薄膜及其微观形态的SPM研究[J].河北省科学院学报,2008,25(4):41-44. |
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| 作者姓名： | 申玉双 杨芙丽 许新芳 翟学良 |
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| 作者单位： | 1. 河北化工医药职业技术学院化工系,河北,石家庄,050026
2. 河北师范大学实验中心,河北,石家庄,050016 |
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| 基金项目： | 河北省自然科学基金课题资助(B2006000136) |
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| 摘 要： | 采用溶胶-凝胶(Sol-Gel)法合成稳定的前驱体溶液,在单晶硅(100)上用甩膜法制得了均匀致密的钛酸钡薄膜,利用差热-热重(DTA-TGA)技术分析了钛酸钡(BT)干凝胶的热演化过程,首次用电子探针显微镜(SPM)之原子力显微镜(AFM)直接地从三维的角度观测了钛酸钡薄膜微观形成过程,并用XRD技术跟踪了薄膜加热过程中物相的变化情况,得到了薄膜生长的基本信息,最终制得了表面光滑的钛酸钡薄膜,晶粒大小在50-70nm之间。最佳煅烧温度为700℃。
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| 关 键 词： | 无机非金属材料 钛酸钡薄膜 甩膜法 扫描探针 |
Morphology studies of Sol-spin-coating synthesis derived BaTiO3 thin films by SPM |
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| SHEN Yu-Shuang,YANG Fu-Li,XU Xin-Fang,ZHAI Xue-Liang.Morphology studies of Sol-spin-coating synthesis derived BaTiO3 thin films by SPM[J].Journal of The Hebei Academy of Sciences,2008,25(4):41-44. |
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| Authors: | SHEN Yu-Shuang YANG Fu-Li XU Xin-Fang ZHAI Xue-Liang |
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| Institution: | 1.Chemical Engineering Department;Hebei Chemical & Pharmaceutical Vocational Technology College;Shijiazhuang Hebei050026;China;2.Experiment Centre;Hebei Normal University;Shijiazhuang Hebei050016;China |
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| Abstract: | BaTiO3(BT) thin films were prepared on Si(100) substrates by the sol-spin-coating technique with stable precursor solution.The thermolysis processes of BT-gel was analyzed by differential thermal analysis and thermogravimetry analysis(DTA-TGA).And for the first time we investigated the growing process of the ceramic films clearly from Three Dimensions by advanced Atomic Force Microscopy(AFM) which is one microscopy of Scanning probe Microscope(SPM).And the effects of heating on phase formation were investig... |
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| Keywords: | inorganic non-metallic materials barium titanate thin films spin-coating SPM |
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