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高分辨率双频激光回馈的位移测量方法
引用本文:张立,吴云,周鲁飞,张书练.高分辨率双频激光回馈的位移测量方法[J].北京交通大学学报(自然科学版),2009,33(6).
作者姓名:张立  吴云  周鲁飞  张书练
作者单位:北京交通大学,理学院,北京,100044;清华大学,精密测试技术及仪器国家重点实验室,北京,100084
基金项目:国家自然科学基金资助项目 
摘    要:在分析双频激光回馈测量原理的基础上,提出了一种基于双频激光回馈原理的高精度位移测量方法,研究了双频激光回馈的基本现象并给出了理论依据,进一步在回馈光学系统基础上,对两路正交的光回馈条纹,利用电路进行细分处理:即5细分和4倍频电路相结合,细分产生的计数脉冲最后送入单片机进行计算及显示.采用可编程逻辑器件FPGA和单片机设计信号处理电路,利用FPGA实现4倍频细分,利用电阻链细分实现5细分.全部电路通过逻辑、时序仿真,验证了本方法的可行性.目前此系统可满足高精度位移测量的要求.

关 键 词:位移测量  双频激光  光回馈  细分

Dual-Frequency Laser Optical Feedback Displacement Measurement System with High Resolution
ZHANG Li,WU Yun,ZHOU Lufei,ZHANG Shulian.Dual-Frequency Laser Optical Feedback Displacement Measurement System with High Resolution[J].JOURNAL OF BEIJING JIAOTONG UNIVERSITY,2009,33(6).
Authors:ZHANG Li  WU Yun  ZHOU Lufei  ZHANG Shulian
Institution:ZHANG Li1,WU Yun1,ZHOU Lufei2,ZHANG Shulian2(1.School of Science,Beijing Jiaotong University Beijing 100044,China,2.The State Key Laboratory of Precision Measurement Technology , Instruments,Department of Precision Instruments,Tsinghua University,Beijing 100084,China)
Abstract:A high-resolution displacement measurement system based on weak feedback effect of birefringence dual frequency lasers has been presented and demonstrated.The experimental setup of an optical feedback dual-frequency laser is developed by using the phase delay between the optical feedback fringes of the two orthogonally polarized lights to realize displacement division and direction discrimination.A concise theory is given to explain this experimental result.The sub-circuit is mainly composed of the 5-divisi...
Keywords:displacement measurement  dual-frequency laser  optical feedback  subdivision
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