| 掺铝P型单晶硅尾料真空冶炼提纯研究 |
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| 引用本文： | 李志红,马文会,梅向阳,杨斌. 掺铝P型单晶硅尾料真空冶炼提纯研究[J]. 中山大学学报(自然科学版), 2009, 48(Z2) |
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| 作者姓名： | 李志红 马文会 梅向阳 杨斌 |
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| 作者单位： | 1. 昆明理工大学,真空冶金国家工程实验室,云南,昆明,650093;昆明冶金高等专科学校,云南,昆明,650033
2. 昆明理工大学,真空冶金国家工程实验室,云南,昆明,650093 |
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| 基金项目： | 教育部新世纪优秀人才支持计划，云南省中青年学术技术带头人后备人才基金 |
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| 摘 要： | 利用真空蒸发和定向凝固技术去除掺铝P型单晶硅尾料中铝杂质的方法,通过晶相仪、EBSD和ICP-AES检测,被证实是非常有效的.铝含量检测结果表明:提纯后的铝含量沿多晶硅铸锭纵向由下到上逐渐增高,且总量较提纯前有较大幅度的降低.
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| 关 键 词： | 尾料 多晶硅 定向凝固 真空蒸发 |
Experimental Research on Purifying the Tailing Material of Al-doped P-type Mono-crystal Silicon by Vacuum Metallurgy |
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| LI Zhihong,MA Wenhui,MEI Xiangyang,YANG Bin. Experimental Research on Purifying the Tailing Material of Al-doped P-type Mono-crystal Silicon by Vacuum Metallurgy[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 2009, 48(Z2) |
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| Authors: | LI Zhihong MA Wenhui MEI Xiangyang YANG Bin |
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| Abstract: | The strategy that is based on utilizing vacuum evaporation and directional solidification techniques is proved to be a very ef-ficient approach to remove aluminum from tailing material of Al-doped p-type mono-crystal silicon. Optical metallographic microscope patterns and EBSD (Electron Back Scattering Diffraction) statistic diagrams illustrate the behaviors of crystal growth during the purifi-cation processes. ICP-AES (Inductively Coupled Plasma-Atomic Emission Spectrophotometry) analysis is used to detect the concentra-tion of aluminum. The analysis results indicate that the concentration of aluminum increases along the longitudinal direction from bottom to top of ingot, and the impurities are remarkably eliminated. |
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| Keywords: | tailing material multi-crystalline silicon directional solidification vacuum evaporation |
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