半导体制造系统优化调度模型的分解和简化方法

在半导体制造系统流体网络模型的基础上，建立了以减小平均在制品水平为目标的可分解的优化调度模型，利用其可分解的特性，把整个调度周期划分为若干等长的子区间，把原调度问题分解为这些子区间上的子问题。在半导体制造环境下，这些子问题可以进一步简化，因此通过求解这些子问题得到了原调度问题的解。这种算法的计算量与调度周期成正比，而且应用实例表明，其性能有很大提高。

Decomposition and Simplification of Scheduling Model for Manufacturing Semiconductors

A scheduling model, with the objective of minimizing the average WIP (Work In Process) level, is built based on the fluid network model of semiconductor manufacturing systems. Taking advantage of the characteristic of decomposition, the scheduling scheme is divided into a series of subareas with the same length. The original scheduling problem is then decomposed into subproblems on each subarea. The solution can be obtained by summing the solutions of the subproblems. The computational complexity of the algorithm is proportional to the scheduling scheme. Improvement in performance and efficiency are shown by an example.