| 用于强功率半导体激光器的石英柱微透镜阵列 |
| |
| 引用本文： | 张新宇,易新建,何苗,赵兴荣. 用于强功率半导体激光器的石英柱微透镜阵列[J]. 华中科技大学学报(自然科学版), 1998, 0(Z2) |
| |
| 作者姓名： | 张新宇 易新建 何苗 赵兴荣 |
| |
| 作者单位： | 华中理工大学光电子工程系 |
| |
| 摘 要： | 采用光刻热熔法及离子束溅射刻蚀制作面阵石英柱微透镜阵列．表面探针和扫描电子显微镜的测试表明，在不同的工艺条件下制成的柱微透镜的表面轮廓具有明显的差异，给出了描述柱微透镜制作过程中的几个重要工艺参量的拟合关系式．
|
| 关 键 词： | 离子束刻蚀；柱微透镜阵列；制作 |
Cylinder Quartz Microlens Arrays Coupled with High Power Semiconductor Laser Arrays |
| |
| Zhang Xinyu Yi Xinjian He Miao Zhao Xingrong. Cylinder Quartz Microlens Arrays Coupled with High Power Semiconductor Laser Arrays[J]. JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE, 1998, 0(Z2) |
| |
| Authors: | Zhang Xinyu Yi Xinjian He Miao Zhao Xingrong |
| |
| Affiliation: | Zhang Xinyu Yi Xinjian He Miao Zhao Xingrong |
| |
| Abstract: | The microlens quartz array in cylinder is fabricated by phodtolithography and Ar ion beam etching. Surface stylus measurement and scanning electron microscopy (SEM) show that the surface difference between the photoresist masks of the cylinder shapes and the quartz microlens arrays prepared at different etching conditions are clear. The experimenting relations between the several important parameters and the Ar ion beam enegy are given. |
| |
| Keywords: | ion beam etching microlens arrays fabricat |
| 本文献已被 CNKI 等数据库收录！ |
