磁控溅射PP基氧化锌／铜层状膜性能研究

用磁控溅射法在PP非织造布表面沉积氧化锌/铜薄膜来增加抗静电、抗菌、抗紫外等性能．研究首先采用正交试验设计方法沉积铜薄膜，选择最优抗静电性效果的铜膜．铜膜参数为1Pa，20W，5min时，抗静电性能达到最好．接着在沉积最优铜膜的PP表面溅射不同参数氧化锌形成层状膜，并利用扫描电子显微镜进行表面分析．结果表明，ZnO／Cu层状膜比ZnO单层膜颗粒明显且更加致密．经过测试后，镀层状膜的PP具有良好的抗紫外透过性和良好的抗菌性．氧化锌参数为0．5Pa，75W，40min，铜膜参数为1Pa，20W，5min具有最好抗紫外性．

Characterization of ZnO/Cu layered films by magnetron sputtering

ZnO/Cu thin layered films are deposited on PP nonwoven substrates by magnetron sputtering to increase the anti-static,anti-bacterial, UV and other properties. First, this research bases on orthogo- nal experimental design method by magnetron sputtering to choose Cu thin film with has optimal anti- static property. When the parameter of Cu is 1 Pa, ：20 W, 5 min, it has optimal antistatic property. Second, different parameters of ZnO are sputtered in PP ＂which have sputtered Cu film with optimal antistatic property. Last, the morphology is observed by Scanning Electron Microscopy（SEM）. The result show that ZnO/Cu thin layered films are clearer and compacter than ZnO thin films. The tests indicate that the PP nonwoven which is deposited layered thin films has a high absorbency of ultraviolet and a good anti- bacterial property. When Zinc oxide parameter is 0.5 Pa,75 W,40 min and the copper film parameter is 1 Pa,20 W,5 rain,the layered film has the best UV resistance.