| 一种微电子机械系统共振器的非线性自由振动 |
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| 引用本文： | 陈运生,杨国来,杭燚.一种微电子机械系统共振器的非线性自由振动[J].南京理工大学学报(自然科学版),2003,27(5):515-519. |
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| 作者姓名： | 陈运生 杨国来 杭燚 |
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| 作者单位： | 南京理工大学机械工程学院,南京,210094 |
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| 摘 要： | 该文建立了某微电子机械系统共振器的单自由度非线性力学模型，由微分方程的线性化方法和一元高次方程理论，讨论了自由振动的平衡位置以及系统非线性自由振动的频率和运动响应的求解方法，给出了刚度较小时的非线性自由振动的解析解，这对相应的共振器设计具有一定的参考价值。
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| 关 键 词： | 微电子机械系统 共振器 非线性 自由振动 |
| 修稿时间： | 2003年5月9日 |
Free Vibration with Nonlinearity for a Resonator of Micro-electro-mechanical System |
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| ChenYunsheng YangGuolai HangYi.Free Vibration with Nonlinearity for a Resonator of Micro-electro-mechanical System[J].Journal of Nanjing University of Science and Technology(Nature Science),2003,27(5):515-519. |
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| Authors: | ChenYunsheng YangGuolai HangYi |
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| Abstract: | The nonlinear model of the single degree of freedom for a resonator of micro-electro-mechanical system(MEMS) is set up. Based on the linearization approach of differential equations and the theory of polynomial equations,the equilibrium place of free vibration and the solution of frequencies and dynamic response for free vibration on the nonlinear system are discussed. The analytical solutions for free vibration on nonlinear system with small cubic stiffness are given. There are better referencial values for relevant resonator design. |
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| Keywords: | micro-electro-mechanical system resonator nonlinearity free vibration |
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