| TPP-1型椭偏谱仪测膜厚的探讨 |
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| 引用本文： | 吴永汉,李艳峰,吴兴惠.TPP-1型椭偏谱仪测膜厚的探讨[J].云南大学学报(自然科学版),2003,25(6):515-517. |
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| 作者姓名： | 吴永汉 李艳峰 吴兴惠 |
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| 作者单位： | 1. 云南大学,物理系,云南,昆明,650091
2. 云南大学,材料科学与工程系,云南,昆明,650091 |
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| 基金项目： | 国家自然科学基金资助项目(50162002). |
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| 摘 要： | 说明原椭偏谱仪不能直接测量膜厚,提出外加波长片后可以测量膜厚的2种方法.
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| 关 键 词： | 椭圆偏振 薄膜厚度 位相差 |
| 文章编号： | 0258-7971(2003)06-0515-03 |
| 修稿时间： | 2003年3月11日 |
Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films |
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| WU Yong-han,LI Yan-feng,WU Xing-hui.Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films[J].Journal of Yunnan University(Natural Sciences),2003,25(6):515-517. |
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| Authors: | WU Yong-han LI Yan-feng WU Xing-hui |
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| Institution: | 1. Department of Physics, Yunnan University, Kunming 650091, China;2. Department of Material Science and Engineering, Yunnan University, Kunming 650091, China |
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| Abstract: | It is shown that the conventional ellipsometer can not be used to measuring the films’thickness.To solve this problem,it is suggested thst two kinds of methods for measuring the thickness of thin films by addition of filter wavelength leaf. |
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| Keywords: | ellipsometer the thickness of thin films phase difference |
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