| 基于压电陶瓷的光学微扫描器及其有限元分析 |
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| 引用本文： | 陈伟力,徐超,金伟其,王霞,徐加悦.基于压电陶瓷的光学微扫描器及其有限元分析[J].北京理工大学学报,2008,28(11):1003-1007. |
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| 作者姓名： | 陈伟力 徐超 金伟其 王霞 徐加悦 |
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| 作者单位： | 北京理工大学,信息科学技术学院光电工程系,北京,100081;北京理工大学,信息科学技术学院光电工程系,北京,100081;北京理工大学,信息科学技术学院光电工程系,北京,100081;北京理工大学,信息科学技术学院光电工程系,北京,100081;北京理工大学,信息科学技术学院光电工程系,北京,100081 |
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| 基金项目： | 国家部委预研项目
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国家级课题
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| 摘 要： | 研究基于压电陶瓷和柔性铰链的光学微扫描器及其放大机构的位移放大原理,分析单轴圆弧型柔性铰链性能,利用有限元方法对光学微扫描器的柔性铰链放大机构进行仿真.结果表明:柔性铰链的最小厚度值为圆弧半径的2倍时,微扫描器位移放大结构达到稳定位移,放大机构的放大率提高到压电陶瓷驱动位移的3.25倍,进一步验证了放大机构设计的合理性.
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| 关 键 词： | 微扫描器 柔性铰链 有限元分析 |
| 收稿时间： | 2008/4/10 0:00:00 |
Finite Element Analysis and Optical Micro-Scanner Based on Ferroelectric Ceramics |
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| CHEN Wei-li,XU Chao,JIN Wei-qi,WANG Xia and XU Jia-yue.Finite Element Analysis and Optical Micro-Scanner Based on Ferroelectric Ceramics[J].Journal of Beijing Institute of Technology(Natural Science Edition),2008,28(11):1003-1007. |
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| Authors: | CHEN Wei-li XU Chao JIN Wei-qi WANG Xia and XU Jia-yue |
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| Institution: | Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 10081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 10081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 10081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 10081, China;Department of Optical Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 10081, China |
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| Abstract: | Optical micro-scanner and its amplifier structure based on ferroelectric ceramics as well as flexible hinge is presented;and the properties of single-axis and flexible hinge analyzed.Finite element method is then used to simulate the flexible hinge magnification of the optical micro-scanner.It shows that when the minimum thickness of flexible hinge is twice the radius of arc,the micro-scanner structure can perform stable displacement,while the magnification ratio is enhanced to 3.25 times the displacement given by ferroelectric ceramics.The rationality of magnifying structure is thus validated exactly. |
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| Keywords: | micro-scanner flexible hinge finite element analysis |
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