| Zn1-xCrxO稀磁半导体薄膜的制备及磁性研究 |
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| 引用本文： | 陈霞,陈希明,李杰,张俊萍.Zn1-xCrxO稀磁半导体薄膜的制备及磁性研究[J].天津理工大学学报,2008,24(3). |
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| 作者姓名： | 陈霞 陈希明 李杰 张俊萍 |
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| 作者单位： | 天津理工大学,电子信息与通信工程学院,天津,300191;天津市薄膜电子与通信器件重点实验室,天津,300191 |
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| 摘 要： | 采用磁控交替溅射方法和真空退火处理制备了Zn1-xCrxO薄膜,利用全自动X射线衍射仪和物理性质测量仪对样品的结构、晶粒尺寸及磁性等进行了测量和标度,得到了具有室温磁性的掺Cr的氧化锌基稀磁半导体.
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| 关 键 词： | 稀磁半导体 氧化锌 掺杂 磁控溅射法 |
Studies of preparation and magnetism in Cr-doped ZnO diluted magnetic semiconductors |
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| CHEN Xia,CHEN Xi-ming,LI Jie,ZHANG Jun-ping.Studies of preparation and magnetism in Cr-doped ZnO diluted magnetic semiconductors[J].Journal of Tianjin University of Technology,2008,24(3). |
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| Authors: | CHEN Xia CHEN Xi-ming LI Jie ZHANG Jun-ping |
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| Abstract: | In this paper Cr-doped zinc oxide(ZnO) thin films were prepared by magnetron sputtering and annealed in vacuum.The samples' structure,grain size and magnetism were further measured by X-ray diffraction and PPMS.The measure shows that the ZnO-based diluted magnetic semiconductors doped with Cr have room-temperature ferromagnetism. |
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| Keywords: | diluted magnetic semiconductor ZnO doping magnetron sputtering |
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