| 离子束溅射氟碳高分子膜的X射线能谱研究 |
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| 引用本文： | 刘萍,齐宏进. 离子束溅射氟碳高分子膜的X射线能谱研究[J]. 山东师范大学学报(自然科学版), 2001, 16(2): 154-157 |
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| 作者姓名： | 刘萍 齐宏进 |
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| 作者单位： | 1. 青岛教育学院生化系
2. 青岛大学化工系, |
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| 摘 要： | 在不同放电条件下利用离子束溅射法制备了聚酯膜基底上的氟碳高分子膜，用光电子能谱法对其结构进行了分析表征，研究发现，该条件下制备的氟碳高分子由－CF3，－CF2，－CF和－C－两个基团组成，随着施加能量的增大，富氟组分增加导致氟碳比增加，但在较高能量下这种变化趋缓，氟碳高分子在这种能量变化中逐渐向直链、饱和，较小分子量的结构转变。
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| 关 键 词： | 氟碳高分子膜 光电子能谱 离子束溅射 微结构分析 |
STUDY OF X- RAY ENERGYSPECTRUM ON FLUOROCARBON POLYMER FILMS ON POLYESTER BY ION BEAM SPUITERING |
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| Liu Ping,Qi Hongjin. STUDY OF X- RAY ENERGYSPECTRUM ON FLUOROCARBON POLYMER FILMS ON POLYESTER BY ION BEAM SPUITERING[J]. Journal of Shandong Normal University(Natural Science), 2001, 16(2): 154-157 |
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| Authors: | Liu Ping Qi Hongjin |
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| Affiliation: | Liu Ping 1) Qi Hongjin 2) |
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| Abstract: | Polymer fluorocarbon films on polyester were prepared under various discharge conditions by ion-beam sputtering and characterized by using XPS.It was found that the polymer fluorocarbon consists of four groups,-C-,CF-,CF 2-,and CF 3-,under the conditions.A increase in content of rich-fluorin components leads to increase in F/C ratio with increasing applied power.However,the change becomes slowers at higher power.The change of power make the fluorocarbon more saturation and smaller. |
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| Keywords: | polymer fluorocarbon film photoelectronspectrum ion-beam sputter microstructure analysis |
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