| 无ECP附件在X-650扫描电镜上实现电子通道花样的技术 |
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| 引用本文： | 陈小群.无ECP附件在X-650扫描电镜上实现电子通道花样的技术[J].中南大学学报(自然科学版),1993(1). |
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| 作者姓名： | 陈小群 |
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| 作者单位： | 中南矿冶学院测试分析中心 |
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| 摘 要： | 在未配备电子通道花样(ECP)附件的日立X-650大型扫描电镜上通过调节仪器参数、控制成像条件成功地实现了ECP功能。文中介绍了实现这一功能的具体实验步骤,并就各仪器参数对电子通道花样图像质量的影响进行了详细讨论,提出了在X-650扫描电镜上不用ECP附件实现电子通道花样技术的最佳实验条件。
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| 关 键 词： | 电子通道花样 扫描电镜 单晶硅 |
TECHNIQUE OF PERFORMING ELECTRON CHANNELLE PATTERN IN X-650 SEM WITHOUT ECP ATTACHMENT |
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| Chen Xiaoqun Test and Analysis Centre.TECHNIQUE OF PERFORMING ELECTRON CHANNELLE PATTERN IN X-650 SEM WITHOUT ECP ATTACHMENT[J].Journal of Central South University:Science and Technology,1993(1). |
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| Authors: | Chen Xiaoqun Test and Analysis Centre |
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| Institution: | Chen Xiaoqun Test and Analysis Centre |
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| Abstract: | Electron channelle pattern (ECP) has been sucessfully obtained by adjusting the instru-ment parameters and illumination system in a X-650 Scanning Electron Microscope. The de-tailed procedure of obtaining the pattern and effects of the instrument parameters on thequality of ECP image have been described and discussed in this paper. The best operatingconditions for realizing ECP function have been given. |
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| Keywords: | ECP SEM signal crystal of silicon |
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