射频溅射a—Si:F,H中载流子的低温传导 |
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引用本文: | 李清山 马玉蓉. 射频溅射a—Si:F,H中载流子的低温传导[J]. 曲阜师范大学学报, 1992, 18(4): 67-70 |
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作者姓名: | 李清山 马玉蓉 |
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作者单位: | [1]曲阜师范大学物理系,山东曲阜273165 [2]中国科技大学物理系,安徽合肥230022 |
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摘 要: | 在300-77K温区内对射频溅射制备的a-Si:F,H薄膜样品作了直流电导测量,结果表明,当T>200K时载流子的传导是以最近邻跳迁传导为主,而在77K<T<140K温区变程跳跃传导点了主要地位,费米能级附近的隙态密度约为10^20cm^-3eV^-1。
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关 键 词: | a-Si:F H 射频溅射 薄膜 低温传导 载流子 |
CARRIER CONDUCTION AT LOW TEMPERATURE IN RADIO FREQUENCY SPUTTERED a-Si:F,H |
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Abstract: | The dc conductivity in a-Si:F,H thin film prepared by radio frequency sputtering has been measured in the temperature range from 300K to 77K. It is found that when temperature is higher than 200K nearest-neighbour hopping conduction is predominant, while as temperature between 77K and 140K variable-range hopping is dominant. The density of states at Fermi level in the gap is about 10~(20)cm~(-3)ev(-1) |
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Keywords: | a-Si:F H nearest-neighbour hopping conduction variable-range hopping conduction the density of states |
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