| 衬底温度对激光脉冲沉积氧化锌薄膜结构及发光性能的影响 |
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| 引用本文： | 李少兰. 衬底温度对激光脉冲沉积氧化锌薄膜结构及发光性能的影响[J]. 松辽学刊, 2008, 29(4): 44-46 |
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| 作者姓名： | 李少兰 |
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| 作者单位： | 鲁东大学学报编辑部 |
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| 基金项目： | 山东省自然科学基金 |
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| 摘 要： | 在单晶硅衬底上用激光脉冲沉积方法制备了氧化锌薄膜，研究了衬底温度对薄膜结构、形貌和发光性能的影响．
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| 关 键 词： | 脉冲激光沉积 氧化锌薄膜 光致发光 |
Effects of Substrate Temperature on Structural and Photoluminescence Properties of ZnO Films by Pulsed Laser Deposition |
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| LI Shao-lan. Effects of Substrate Temperature on Structural and Photoluminescence Properties of ZnO Films by Pulsed Laser Deposition[J]. Songliao Journal (Natural Science Edition), 2008, 29(4): 44-46 |
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| Authors: | LI Shao-lan |
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| Affiliation: | LI Shao-lan (Editorial Department, Ludong University, Yantai 264025, China) |
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| Abstract: | ZnO films were prepared by pulsed laser deposition on crystal silicon substrate.The effects of substrate temperature on structural and photoluminescence properties of ZnO films were studied. |
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| Keywords: | pulsed laser deposition ZnO film photoluminescence |
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