| 一种原子力显微镜中蠕变迟滞非线性特性补偿方案 |
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| 引用本文： | 肖祥丽,张承进. 一种原子力显微镜中蠕变迟滞非线性特性补偿方案[J]. 福州大学学报(自然科学版), 2008, 36(Z1): 4-7 |
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| 作者姓名： | 肖祥丽 张承进 |
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| 作者单位： | 山东大学控制科学与工程学院,山东,济南,250061 |
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| 摘 要： | 压电陶瓷通常用于原子力显微镜(AFM)中的扫描器中,但是在无补偿开环控制中压电陶瓷在输入电压与输出位移之间表现出明显的迟滞和蠕变非线性特性,使得扫描所得图像失真.为此,针对原子力显微镜X轴的需求,采用了分步补偿的办法,先补偿蠕变特性而且可以简化迟滞补偿的算法,很大程度上减轻了图像的失真,使整个控制算法简单,无需复杂的运算,降低了对控制系统处理器的要求,降低设备成本.
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| 关 键 词： | 压电驱动器 迟滞特性 蠕变特性 纳米定位 |
A compensating scheme for hysteresis and creep in atomic force microscope scanner |
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| XIAO Xiang-li,ZHANG Cheng-jin. A compensating scheme for hysteresis and creep in atomic force microscope scanner[J]. Journal of Fuzhou University(Natural Science Edition), 2008, 36(Z1): 4-7 |
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| Authors: | XIAO Xiang-li ZHANG Cheng-jin |
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| Affiliation: | (School of Control Science and Engineering,Shandong University,Jinan,Shandong 250061,China) |
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| Abstract: | The piezoelectric actuator is used as the scanner in the atomic force microscope.It has obvious creep and hysteresis between the input voltage and the output displacement in the open control loop without compensation,which make the image distortion seriously.For the atomic force microscope X axial,we introduced the compensation method of the two characters separately,because after the creep compensation,the hysteresis compensation is easier to realize.This method is simple to realize,eliminates the effects of creep and hysteresis effectively and decreases the request of the processor. |
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| Keywords: | piezoelectric actuator hysteresis creep nano-positioning |
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