复杂多层结构的二次离子质谱定量深度分析

讨论了用ＣＡＭＥＣＡＩＭＳ－４ｆ型二次离子质谱仪对ＡｌｘＧａ１－ｘＡｓ复杂多层结构定量深度分析的方法。采用ＣｓＭ＋技术，完成了无外部参考物质ＡｌｘＧａ１－ｘＡｓ基体成分定量分析，提出并实验验证了一种新的变溅射速率深度校准方法，详细讨论了复杂基体中对杂质进行定量分析时二次离子类型的选择，还尝试了在缺乏足够参考物质时杂质含量的实验估算。实现了二次离子质谱（ＳＩＭＳ）对复杂多层结构的定量分析，同时得到了主成分和杂质的定量深度分布，并保持了ＳＩＭＳ的优良深度分辨本领。     

GaP外延层引入杂质的成因研究

利用ＳＩＭＳ方法对一种先进的液相外延法制成的ＧａＰ处延层杂质进行了研究。这种外延层中杂质种类少，含量小，过渡元素仅含Ｃｒ和Ｆｅ，质量可与日本同类产品相比；表明外延层中杂质的引入主要来源于外延过程。还初步研究了掺杂Ｚｎ的数密度随深度的分布情况，杂质的分布与掺杂Ｚｎ的分布呈相关趋向。因此，杂质的引入还可能与Ｚｎ的纯度有关。外延层中Ｐ＾＋层的厚度估计为１μｍ。     

Shell microlaminations of the freshwater bivalveHyridella depressa as an archival monitor of manganese water concentration: Experimental investigation by depth profiling using secondary ion mass spectrometry (SIMS)

Specimens of the freshwater unionid bivalveHyridella depressa were experimentally exposed to a synthetic river water containing an elevated Mn water concentration (20 mg l^–1) for 2 or 6 days. SIMS depth profiles through the incremental nacre microlaminations or tablets (0.6 m breadth) of the shells of these bivalves showed increases in the signal intensity of Ca-normalised Mn that corresponded to the period of exposure. These results support the proposition that bivalve shells can be used as retrospective monitors of water chemistry. They also indicate that 1) there is a lag phase between exposure to the elevated Mn water concentration and its expression in the shell, and 2) the period for Mn in the shell to reach equilibrium with the aquatic medium is greater that 2 to 6 days.     

Zircon SIMS ages and chemical compositions from Northern Dabie Terrain: Its implication for pyroxenite genesis

We present the results of a detailed micro-scale investigation of zircons from pyroxenites, Daoshicong Northern Dabie using a combination of SIMS and ICPMS. The SIMS measurements gave ages of 134—159 Ma. Its average of (144.5± 6.2) Ma is interpreted as the best estimate of the pyroxenite intrusion. The crystallization of zircons continued for quite a long time and underwent slow cooling. The pyroxenites are products of post-collision magmatism. The REE pattern is HREE-enriched, and its HREE concentrations fall between the magmatic and metamorphic range of gneissic zircons from the Dabie area, which indicate the involvement of crust material in its mantle source.     

SIMOX材料结构,电特性及杂质分析

用扩展电阻（ＳＲＰ）,二次离子质谱（ＳＩＭＳ）等方法,测量了ＳＩＭＯＸ样品的各层结构、电特性和杂质分布。讨论了不同方法的测量,说明了ＳＩＭＯＸ材料顶部硅层的扩展缺陷和杂质的施主作用。用制作适合器件需要的ＳＯＩ材料,必须控制工艺过程中顶部硅层的杂质污染和损伤。     

Secondary ion mass spectrometry of high-sulfur coal: Observation and interpretation of polysulfur ions

The chemical state of sulfur existing in superhigh-sulfur coal has been studied with high-performance static secondary mass spectrometry. A species of polysulfur ions, as most reasonable mass spectrometric fragments of molecules of elemental sulfur or sulfurite, is observed and exactly determined through accurate mass analysis and isotopic pattern analysis. From the observation, the chemical form of elemental sulfur is considered to occur naturally in coal, particularly in its organic phases or maceral such as telocollinite.     

多层膜样品的背散射/沟道、溅射剥层/背散射和二次离子质谱分析

用背散射／沟道、溅射剥层／背散射和二次离子质谱方法分析了分子束外延生长的Si/GexSi1-x多层膜。由2MeV^4He^ 离子背散射／沟道分析，确定了外延生长薄膜的厚度、组分和晶格结构的完美性；用低能Ar^ 离子溅射剥层，减薄样品外延层厚度后，再做背散射分析，可获得有关较深层薄膜与基体界面和溅射剥层的信息；二次离子质谱分析清晰地显示出溅射剥层前后样品的交替层周期性结构。     

重掺砷硅单晶中痕量硼的二次离子质谱定量分析

重掺砷硅单晶中杂质硼含量的控制是十分关键的，因无法用常规的红外光谱法测试，于是转而使用二次离子质谱法来测试，虽然二次离子发射机理复杂，基体效应明显，但通过相对灵敏度因子法，还是能够比较精确地给出定量测试结果，解决重掺砷硅单晶中硼杂质的定量检测问题，进而为控制硼含量提供了依据和帮助。     

Pt在Ni(Pt)-Si-O固相反应中的影响

深亚微米尺度(90 nm)下,对在金属Ni膜中加入微量Pt,再经过高温退火形成NiSi.对该固相反应的反应序列进行了研究.研究发现Ni2Si-to-NiSi转变温度由300℃提高到350℃;NiSi-to-NiSi2转变温度由640℃提高到775℃;而且,NiSi薄膜的形貌在750℃才开始发生Agglomeration现象.     

利用二次离子质谱法对氢在SiC-C涂层中热稳定性的研究

利用Ar+离子束轰击混合沉积技术(ion beam mixing)在不锈钢基体上制备在不锈钢和碳钢基体上沉积SiC-C涂层,并然后对样品进行加后热处理热去氩处理(400℃/30min),再用5keV的氢离子辐照样品.最后对部分氢离子辐照后的样品进行加热处理(300℃/20min,600℃/20min,900℃/20min),以观察氢在SiC-C涂层中的热稳定性.通过和二次离子质谱仪(SIMS)H元素深度分布和正离子质谱分析,研究氢元素在SiC-C涂层中和在不同基团中的热稳定性后热处理.结果表明,在300℃