含He纳米钛膜的XRD研究

本文采用直流磁控溅射方法,在He／Ar混合气氛中,通过分别改变He／Ar流量比和沉积偏压制备不同He含量的钛膜。利用XRD(X-ray diffraction)对含He钛膜的微观结构和晶粒尺寸进行了研究。结果表明,在其它实验参数不变的情况下,当He／Ar流量比从1.0增加到25时,钛膜的平均晶粒尺寸从19.02nm减小到8.63nm。随着膜中He含量的增加,衍射峰宽化,晶粒细化,He的掺入有抑制纳米晶粒长大的趋势。而当沉积偏压从24V增加到151V时,其平均晶粒尺寸基本不变。He引入引起了（002）晶面衍射峰向小角度移动,晶格参数c增加,而a不变。     

磁控溅射Si/Co多层膜的小角X射线衍射测试研究

用小角X射线衍射方法对Si/Co多层膜进行了测试研究,应用衍射理论对测试中出现的周期数不多的强峰和其间的一系列次强峰进行了分析,在计算多层和单层膜厚度时,提出利用相邻两个衍射峰的角度之差来消除系统误差和定位误差的简便方法,使数据处理得到简化.最后,通过XPS分析指出,在膜层界面具有硅的化合物存在.     

基于TiO2纳米管的三维LiFePO4正极材料的制备及其电化学性能

本文用TiO_2纳米管阵列作为薄膜锂离子电池的三维模板,通过磁控溅射在TiO_2纳米管上沉积LiFePO_4薄膜,制备出了具有三维结构的LiFePO_4薄膜.结果表明,这种结构的电池不仅增大了LiFePO_4与电解质的接触面积、提高了正极材料的利用率,还有效地缩短了锂离子的迁移路径、弥补了锂离子扩散率低的缺陷,从而改善了电极材料的动力学性能.     

镀制工艺对金刚石薄膜透射率的影响

用磁控溅射法制备金刚石薄膜,研究了工作气压,溅射电流、镀膜时间三个参数对金刚石薄膜透射率的影响。得到最佳工艺参数:工作气压1.3 Pa,溅射电流0.4 A,镀膜时间2 min。镀制的金刚石薄膜可以作为红外元件的保护膜与增透膜。     

同轴磁控管中阳极谐振系统的谐振频率计算

本文利用电磁场理论知识,得出了同轴磁控管中由内腔经隙缝与外腔耦合所构成的复合谐振系统的谐振频率计算方法。利用此组计算公式,可计算出各不同振荡模式的谐振频率。这有助于在设计制造同轴磁控管时,分析管内存在的干扰模式,以便采取措施加以克服。     

接收相干处理算法的分析与评述

接收相干处理算法是磁控管脉冲振荡体制雷达实现动目标检测的关键。在分析几种接收相干处理算法的基础上 ,重点评述了它们的相干性、优缺点、适用性和实现的难易程度。总结了接收相干处理算法在磁控管脉冲振荡体制雷达应用中要注意的几个典型问题。指出了接收相干处理技术目前研究的难点和发展方向 ,这对接收相干处理算法的研究和应用具有积极意义。     

Solid solution or amorphous phase formation in TiZr-based ternary to quinternary multi-principal-element films

TiZr-based multicomponent metallic films composed of 3–5 constituents with almost equal atomic concentrations were prepared by cosputtering of pure metallic targets in an Ar atmosphere.X-ray diffraction was employed to determine phase composition,crystalline structure,lattice parameters,texture and crystallite size of the deposited films.The deposited films exhibited only solid solution(fcc,bcc or hcp) or amorphous phases,no intermetallic components being detected.It was found that the hcp structure was stabilized by the presence of Hf or Y,bcc by Nb or Al and fcc by Cu.For the investigated films,the atomic size difference,mixing enthalpy,mixing entropy,Gibbs free energy of mixing and the electronegativity difference for solid solution and amorphous phases were calculated based on Miedema’s approach of the regular solution model.It was shown that the atomic size difference and the ratio between the Gibbs free energies of mixing of the solid solution and amorphous phases were the most significant parameters controlling the film crystallinity.     

Si掺杂TiSiN涂层的结构特征及力学性能

通过射频磁控溅射在单晶硅(111)和硬质合金衬底上制备Si掺杂的TiSiN纳米复合涂层。采用双靶溅射技术,保持Ti靶功率不变,改变Si靶的功率以获得Si含量不同的TiSiN纳米复合涂层。用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和显微硬度计表征TiSiN涂层的结构、成分、形貌和硬度。研究结果表明,Si靶溅射功率对TiSiN涂层的结构和力学性能影响较大。随着Si靶溅射功率的增加,TiN晶粒特征峰由(111)向(200)转变,在20 W的Si靶溅射功率下(111)面取向最优。涂层厚度随着功率的增大呈现先增大后减小的趋势。Si以非晶相Si_3N_4的形式存在;随着Si含量的增加表面晶粒得到细化,在20 W的Si靶溅射功率下,涂层晶体生长致密光滑,涂层硬度高达2 600 HV。     

Durable, high conductivity, superhydrophobicity bamboo timber surface for nanoimprint stamps

Superhydrophobic bamboo timber was fabricated by magnetron sputtering and nanoimprint stamps. Conductive copper film was deposited on the surface of bamboo timber, followed by transferring lotus leaf structure pattern to the Cu-bamboo timber surface. Modified by stearic acid, the as-prepared surface with lotus leaf structure showed superhydrophobic property with the water contact angle of 152°, and the sliding angle was only 5°. The coating showed excellent mechanical resistance, environmental stability and high conductivity. It was expected that this work could promote the applications of superhydrophobic and conductive bamboo products.     

Ni80Fe20/Al2O3/Ni80Fe20磁性隧道结中间绝缘层同TMR关系的研究

采用离子束和磁控溅射技术制备了Ni80Fe20／Al2O3／Ni80Fe20磁性隧道结样品,主要研究了中间绝缘层对隧道结磁电阻效应的影响．结果表明,中间氧化物的厚度对磁电阻值起调节作用,在3～7nm范围内磁电阻基本呈现单调递减现象．为提高磁隧道结磁电阻性能做了实验尝试．