微细电解加工实验研究

针对微细电解加工中脉冲电源技术,电解液成分配比,以及加工间隙检测、控制等问题开展了微细电解加工技术的试验研究工作.首先讨论了微细电解加工的工艺特点和主要技术步骤,然后利用高频窄脉冲电源进行了加工实验.通过实验现象和实验结果的研究分析,提出了改进加工实验的方案,通过实验证明了本方案和技术路线的可行性,并获得了很好的微结构加工试验结果.通过微细电解加工实验的研究,为微细电解加工的生产应用提供了依据,显示出微细电解加工方法在金属零件微制造方面有着广阔的应用前景.     

一种计算微机械小孔耦合微带天线阻抗的新方法

利用传输线模型结合微带线和波导缝隙间的耦合机制 ,结合对有效介电常数的计算 ,提出了一种适用于小孔耦合微带天线以及微机械微带天线工程设计使用的计算方法 ,并利用该方法计算了小孔耦合微带天线的输入阻抗以及微机械结构微带天线的输入阻抗 ,并将其反射损失和其它方法所得结果进行了比较 ,比较结果证实了本文方法的有效性 .     

准分子激光微细加工

准分子激光对无机和有机材料都有着很好的消融和蚀刻性能 .本文主要描述了准分子激光消融和蚀刻在微细加工方面的应用     

脉冲约束刻蚀微加工理论探讨

本提出了脉冲约束刻蚀电化学微加工方法，从半无限和有限扩散脉冲约束刻蚀两个模型出发，从理论上探讨了它的可行性．     

微细电解加工超窄脉冲电源的研发

超窄脉冲电源是实现微细电解加工的关键技术.本文设计了一种新型双路微细电解电源,包括超窄脉冲的产生和功放、加工过程中检测电路以及对脉冲电源保护的电路等,并能减小脉间期间的极化.通过基于超窄脉冲微细电解铣削加工试验,证实了该电源在微细电解加工的可行性.     

Research on the technology of femtosecond laser micromachining based on image edge tracing

Aiming at fabrication of complex microstructures and micro-patterns, a kind of femtosecond laser micromachining technology based on the BMP image edge tracing was proposed. We introduced the general principle of this technology and discussed the implementation of the machining paths extraction, optimization, tracing and the feedback of the machining procession in detail. On the basis of this technology, control software for femtosecond laser micromachining was developed. Furthermore, we have accomplished the fabrication of complicated two-dimensional (2D) micro-patterns on a copper thin film. The results indicate that this technology can be used for digital control micromachining of complex patterns or microstructures at micron and submicron scales by femtosecond laser.     

表面微加工MEMS三维模型的局部变动

现有的微机电系统（MEMS）设计中缺乏面向优化的MEMS器件变动方法。针对表面微加工MEMS,在可制造性分析的基础上提出了表面微加工MEMS三维模型的局部变动方法。该方法首先在表面微加工MEMS三维模型上选定设计关注面,设计人员对所选定的设计关注面进行变动操作;变动设计后根据变动类型基于可制造性分析自动映射和传播变动到...     

Determination of Mechanical Properties of Micromembranes with Compressive Residual Stress

A novel model of a load-deflection method to determine the mechanical properties of micromembranes with compressive residual stress is described. Since thin film structures are frequently used in micro devices, characterisation of mechanical properties of thin films is desired by the design and fabrication of micromachines. In this paper, the mechanical properties of thin micromembranes under compressive stress are characterised, which are fabricated by bulk micromachining. The relation between the center deflection and the load pressure on a square membrane is deduced by modelling the membrane as an elastic plate having large deflection with clamped boundaries. According to the model, whether the membrane has initial deflection or not has no effect on the measurement result. The Young's modulus and residual stress are simultaneously determined. The mechanical properties of siliconoxide, silicon nitride membranes and composite membranes of polysilicon with silicon nitride are measured.     

新微型医用传感器

本文列举了传感器在人的生理信息的监视，伤员救助病人医疗方面的应用概况和发展前景．     

微机械陀螺真空封装玻璃罩子加工工艺的研究

在硅微机械加工中,封装加工是非常重要的一个过程,对微机械器件实现真空封装后可以极大的提高它的灵敏度等各项技术指标,但目前国内对微机械传感器真空封装技术不成熟.本文主要讲述对陀螺采用玻璃封装时,用于封装的玻璃罩子的加工过程以及玻璃罩子在整个结构中所起的作用,同时叙述了玻璃罩子与微机械结构的键合过程.