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Plasma immersion ion implantation (PI~3), a new technique with certain advantages over biological samples, was developed. Argonion as well as nitrogen ion implantation of the pea seeds has been carried out with the PI~3 implanter and their RBS spectra were also studied. The results show that the mass deposition effect of ion implantation on biological samples can be achieved with the PI~3 implanter. In addition, there is an optimal implantation time for a given treatment condition. It presents new possibilities for the ion implantation into biological samples. 相似文献
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