应用于22nm及以下节点的极紫外光刻胶研究进展

极紫外光刻(EUVL)是最有希望用于22 nm及以下节点的下一代光刻技术,光刻胶的性能与工艺是其关键技术之一。EUV光刻胶应同时满足高分辨率、低线边缘粗糙度和高灵敏度的要求。回顾了应用于22 nm及以下技术节点的EUV光刻胶的发展现状和面临的挑战,介绍了EUVL对光刻胶的基本要求以及分辨率、线边缘粗糙度(LER)和灵敏度之间的平衡关系,阐述了LER的形成机理尤其是LER的降低,从产酸剂、吸收增强、分子尺寸的缩小、酸扩增、酸的各向异性扩散等材料设计方面总结了可能的光刻胶性能改进方案,探讨了EUV光刻胶未来的主要研究方向。     

Processing and characterization of the microstructure and mechanical properties of Al6061–TiB2 composite

In the present research, aluminum metal matrix composites were processed by the stir casting technique. The effects of TiB2 rein-forcement particles, severe plastic deformation through accumulative roll bonding (ARB), and aging treatment on the microstructural charac-teristics and mechanical properties were also evaluated. Uniaxial tensile tests and microhardness measurements were conducted, and the micro-structural characteristics were investigated. Notably, the important problems associated with cast samples, including nonuniformity of the rein-forcement particles and high porosity content, were solved through the ARB process. At the initial stage, particle-free zones, as well as particle clusters, were observed on the microstructure of the composite. However, after the ARB process, fracturing phenomena occurred in brittle ceramic particles, followed by breaking down of the fragments into fine particles as the number of rolling cycles increased. Subsequently, com-posites with a uniform distribution of particles were produced. Moreover, the tensile strength and microhardness of the ARB-processed com-posites increased with the increase in the reinforcement mass fraction. However, their ductility exhibited a different trend. With post-deforma-tion aging treatment (T6), the mechanical properties of composites were improved because of the formation of fine Mg2Si precipitates.     

厦门市老年体育工作的现状及对策

对厦门市老年体育工作的政策保障、经费来源、组织与指导、城乡结对共建、宣传和对外交流方面的调研发现,厦门市老年体育工作存在着各行业老体协服务功能退化,健身辅导员和社会体育指导员未能发挥应有作用,社区老年人体育场地设施使用受限、利用率较低,专业服务人员少、相关科研机构缺失,缺乏非政府组织的积极参与等问题。为实现"健康老龄化"的目标,厦门市应加大对体育非政府组织的指导,加强社区对老年体育的组织、协调、管理、凝聚、整合和服务功能,建立各级社会体育健身指导员的考核奖惩、登记注册等制度,开放社区教育系统体育场地,树立示范老年体育指导站(点),提升服务老年体育工作的专业水平和能力,加强对老年人体育健身活动的科学指导。     

亚微米Al2O3P/Al-Cu-Mg复合材料时效过程的DSC分析

运用DSC分析的手段研究了两种基体合金化的亚微米Al2O3P/Al-Cu-Mg复合材料的时效行为。Al-Cu-Mg合金中时效过程明显,改变Cu、Mg元素含量抑制了时效析出过程。复合材料中,添加亚微米Al2O3颗粒使得G.P.区受到完全抑制,亚稳相的时效析出变得困难;提高Cu含量,在一定程度上促进了复合材料的时效析出。     

UV-2450紫外可见分光光度计的维护与常见故障分析

仪器设备在高校教学科研中有着非常重要的作用。仪器设备的日常维护与保养,是保证设备正常运行的一种重要手段,有利于延长仪器设备的使用寿命,提高实验室的综合效益。因此,了解仪器设备及其日常的一些注意事项显得格外重要。总结了UV-2450紫外可见分光光度计的维护与保养方法,特别是常见故障排除的心得与经验,旨在为更好的使用UV-2450紫外可见分光光度计提供参考。     

共沉淀法制备镁锰双金属氢氧化物及表征

以氯化镁、氯化锰、氢氧化钠及碳酸钠为原料,采用共沉淀法合成镁锰双金属氢氧化物(Mg-Mn-LDH).探讨镁锰摩尔比、反应温度、反应时间等条件对镁锰双金属氢氧化物(Mg-Mn-LDH)结晶性的影响.通过XRD和SEM对产物结晶性、组成结构等进行表征.实验结果表明,在镁锰摩尔比3∶1、反应温度40℃、反应3h、长陈化时间和反应体系pH 13下,制备出的产物的结晶性最好,层状结构也最清晰.     

光谱法研究EDTA-Fe(Ⅲ)与牛血清白蛋白的相互作用

应用紫外光谱法和荧光光谱法研究了乙二胺四乙酸铁(Ⅲ)(EDTA-Fe(Ⅲ))与牛血清白蛋白的相互作用.结果表明:EDTA-Fe(Ⅲ)可以进入牛血清白蛋白的疏水腔,使蛋白质非极性区的生色基暴露于极性溶剂;EDTA-Fe(Ⅲ)通过静态猝灭的方式使牛血清白蛋白的荧光强度显著降低;EDTA-Fe(Ⅲ)与牛血清白蛋白主要以氢键和范德华力相结合.测定了EDTA-Fe(Ⅲ)与牛血清白蛋白的结合常数KA和结合位点数n,利用Forster非辐射能量转移机制确定了牛血清白蛋白与EDTA-Fe(Ⅲ)的结合距离和能量转移效率,并使用同步荧光技术探讨了EDTA-Fe(Ⅲ)对牛血清白蛋白构象的影响.     

橡胶沥青胶结料的老化与再生研究

采用热氧老化的方法研究了老化对橡胶沥青胶结料粘弹性的影响规律,并通过添加再生剂对其软化点、针入度和延度等性能进行恢复。实验结果表明,老化后基质沥青和橡胶沥青的软化点升高、针入度变小、延度降低;老化过程中,基质沥青软化点和针入度的衰减率均大于橡胶沥青,但延度的衰减率则小于橡胶沥青;再生剂能够恢复橡胶沥青性能,但和原样沥青相比,软化点和延度有所降低,针入度则略有增加;延度的再生恢复效率最高,其次是针入度和软化点。     

Effects of baria on propane oxidation activity of Pd/Al2O3 catalyst: Pd–BaO interactio n and reaction routes

The BaO-modified Pd/Al2O3exhibits much better catalytic activity than Pd/Al2O3for C3H8 oxidation both before and after the hydrothermal aging treatment. Further studies ascribe its good activity to the influence of BaO species on the physicochemical characteristics of the catalyst and the reaction routes. Firstly, the BaO species inhibits the phase transformation of alumina, resulting in higher surface area of the catalysts and hereby a better dispersion of Pd. Secondly, the basic nature and electron-withdrawing effect of barium oxide maintain palladium at high oxidation state, which leads to a higher PdO content on surface of the BaO-modified catalyst. Finally, the formation/decomposition of carbonate/bicarbonate species can be promoted by the addition of BaO, which provide extra reaction routes and are important for the deep oxidation of C3H8.     

SBS改性沥青的阶段性老化特征与机理

采用荧光显微镜、红外光谱和凝胶色谱等微观试验,分析苯乙烯-丁二烯-苯乙烯嵌段共聚物(SBS)改性沥青老化过程中的微观相态结构、沥青相的吸氧程度及分子尺寸构成的变化情况.试验与分析结果表明,SBS改性沥青存在着2个明显的老化阶段:第1阶段,沥青吸氧速率较低、小分子比例基本不变,SBS颗粒尺寸逐渐减小并最终发生凝聚、离析,导致SBS改性沥青的韧性逐渐下降,直至完全丧失;第2阶段,沥青吸氧速率显著增大、小分子比例减少,由于SBS降解后苯乙烯仍起到改性作用,使沥青稠度增大,从而沥青软化点呈上升趋势.