超小型He-Ne激光管的研制

采用阴极挡筒及小孔光栏结构,成功研制了上型He-Ne激光管。     

磁性隧道结电阻与电流驱动相关性分析

利用离子束高真空复合溅射装置置备具有Ta缓冲层和Ta/Te/Ta覆盖表面层的Fe/Al2O3/FeCo的磁性隧道结，在零磁场下观测隧道结电导和结电阻面积积（RA）与垂直射入隧道结平面的自旋极化发射电流的依赖关系，研究关系，研究发现，磁性隧道结的电导和RA的发射电流驱动效应取决于隧道结的物相成分，微结构和电流强度，在大驱动电流范围观测电到导特性不同的4个区域。     

溅射Ni16Cr2.5Al微晶涂层及其氧化行为

NiCrAl是NiCrAlY型包覆涂层的主要成分,对NiCrAl涂层的沉积形态及其氧化行为的研究具有重要科学意义.磁控溅射在不锈钢Fe18Cr9Ni0.1Ti基体上制备出Ni16Cr2.5Al微晶涂层(基体分倾斜45 和竖直90 两种方式悬挂),使用SEM/EDAX,X ray,对Ni16Cr2.5Al微晶涂层及其氧化膜进行了分析,以探索高温合金用涂层形成及其氧化膜形成机制.     

溅射过程的Monte Carlo方法模拟计算

运用Monte Carlo方法对溅射过程进行了模拟计算,其结果清楚地描述了溅射的微观过程,溅射产额的计算值与实验值吻合。     

反应磁控溅射离子镀TiN膜的工艺参数

为改进反应磁控溅射离子镀氮化钛膜工艺,提高溅射速率和改善薄膜质量,本实俭测得了靶极电压与氮气流量;靶极电流与氮气流量;溅射室内气体压强与氮气流量;氮化钛膜的颜色与氮分压;靶极功率与氩气分压强的关系,以及薄膜层中氮含量、钛含量沿薄膜表面的分布。探讨了影响镀膜的主要工艺参数。     

Nano Cr Interlayered CrN Coatings on Steels

CrN coated steels assisted with a nano Cr interlayer were investigated. The Cr nano-interlayers were prepared by sputter deposition with a thickness about 70-100 nm. CrN coatings were also prepared by sputter deposition on the Cr nano-interlayers. The crystal structures, microhardness, and scratch resistance of CrN/Cr coatings were determined. Results show that the Cr nano-interlayers improve scratch resistance and the microhardness of CrN coated steels. A rapid heat treatment with infrared （IR） was performed for coated specimens in the attempt to improve bonding, With IR heat treatments, the beneficial effect of the Cr nano-interlayers was clearly observed. Without the Cr nano-interlayers, severe cracks on the surface of coatings were observed after IR heat treatment. However, with a Cr interlayer, no cracks on the surface of CrN coatings were observed after the heat treatment. The scratch resistance of coatings was also affected by the Cr nano-interlayers. The scratch track was clean and showed significantly smaller amount of scratch debris for CrN coatings with Cr interlayers than those without the Cr nano-interlayers. The microhardness of coatings with the Cr nano-interlayers is higher than those without the Cr nano-interlayers after IR heat treatment. The Cr and CrN phase have been identified with X-ray diffraction analysis, and the results show that the higher the nitrogen content in the sputtering gas, the stronger the CrN peaks observed in the diffraction patterns are.     

基体偏压对CrTiAlN镀层摩擦磨损性能的影响

应用闭合场非平衡磁控溅射离子镀技术在高速钢和单晶硅基体上制备了一组随基体偏压变化的CrTiAlN梯度镀层,并测试了其摩擦学性能。结果表明,随偏压的增大,镀层的厚度、硬度、膜基结合强度和耐磨性能表现出先升后降、摩擦系数较低、具有良好的韧性;在-75 V左右偏压下沉积的镀层具有最佳的综合性能。通过XRD、SEM的分析表明,由CrN、TiN、AlN、Cr和Ti2N等微晶组成的复合镀层,晶粒细小,属于纳米级颗粒,从而使镀层具有良好的摩擦学性能。