离子束蚀刻硅片沟槽台阶形貌研究

1 离子束蚀刻实验 1.1 样品制备取机械抛光的N型单晶硅片(1,1,1)作蚀刻样品,均匀涂上厚度为1μm的OMR-83光刻胶,利用集成电路制版技术,用曝光方法将光刻胶刻出宽度分别为15μm,10μm,5μm,长为2mm的长槽。     

Silicon nanoporous pillar array and its surface copper deposition

Silicon nanoporous pillar array （Si-NPA） has been prepared by a hydrothermal etching technique. Using Si-NPA as substrate, a Cu/Si-NPA nanocomposite thin film has been obtained with immersion plating method. Morphological and structural analysis indicates that Si-NPA is a typical structural composite system characterized by a triple hierarchical structure, i. e. the array of micron-sized silicon pillars, the nanopores densely distributed on the surface of the pillars, and the silicon nanocrystallites that constitute the pore walls. Cu/Si-NPA inherits the morphological characteristics of Si-NPA. The compactability of the deposited copper nanoparticles varies alternatively with the local geometrical features of Si-NPA and forms a quasi-periodical pattern.Such an experimental phenomenon is attributed to the velocity dependence of the copper deposition upon the local geometrical features of Si-NPA. These results indicate that Si-NPA might be used as an ideal template for preparing specially patterned, structured or functionalized metal/silicon nanocomposite systems.     

碱炭比对活性炭孔结构及电容特性的影响

以酚醛树脂为原料、KOH为活化剂制备双电层电容器用高比表面积活性炭．考察KOH与酚醛树脂炭的质量比对所制得的活}生炭的吸附性能、孔径分布和比电容的影响．实验结果表明,随着碱炭比的增大,所得活性炭的BET比表面积、总孔容积和中孔容积不断增大,碘吸附值和亚甲基蓝吸附值也不断增大,比电容则先增大后减小并在碱炭比为4时达到最大值74．2F／g．以这种高比表面积活性炭组装成的电容器具有良好的充放电性能和循环性能,既能在大电流下快速充放电也能在小电流下缓慢充放电。     

红外焦平面多孔硅绝热层制备及应用

采用电化学法及原电池法制备了多孔硅样品.通过在阳极氧化反应中HF溶液浓度、电流密度和反应时间的不同来控制多孔硅的孔隙率和膜厚.实验结果表明：不同电流密度下制备的多孔硅样品,孔隙度有相同的变化趋势,刚开始增加,然后减少;多孔硅的生长速度随电流密度的增加而升高.在多孔硅样品表面封装BST热释电敏感元件进行性能测试,结果表明...     

Etching mechanism of barium strontium titanate （BST） thin films in CHF_3/Ar plasma

Reactive ion etching was used to etch barium strontium titanate thin films in a CHF3/Ar plasma.BST surfaces before and after etching were analyzed by X-ray photoelectron spectroscopy to investigate the reaction ion etching mechanism,and chemical reactions had occurred between the F plasma and the Ba,Sr and Ti metal species.Fluorides of these metals were formed and remained on the surface during the etching process.Ti was almost completely removed because the TiF4 by-product is volatile.Minor quantities of Ti?F could still be detected by narrow scan X-ray photoelectron spectra,and Ti?F was thought to be present in the form of a metal-oxy-fluoride.These species were investigated from O1s spectra,and a fluoride-rich surface was formed during etching.BaF2 and SrF2 residues were difficult to remove because of their high boiling point.The etching rate was limited to 12.86 nm/min.C?F polymers were not found on the surface,indicating that the removal of BaF2 and SrF2 was important for further etching.A 1-min Ar/15 plasma physical sputtering was carried out for every 4 min of surface etching,which effectively removed remaining surface residue.Sequential chemical reaction and sputtered etching is an effective etching method for barium strontium titanate films.     

车轮铸钢材料热循环表面氧化特征分析

研究了车轮铸钢在不同温度幅下热疲劳损伤表面及次表层行为．研究发现，表面氧化及剥落现象和氧化物的开裂随循环上限温度的增高而愈加严重；次表层损伤以裂纹为主，附带一些蚀坑．其损伤机理是由于氧化脱碳使铁素体区形成腐蚀坑，腐蚀坑的连接形成微裂纹，热疲劳主裂纹优先通过铁素体区氧化腐蚀坑而向前扩展．     

石油设施腐蚀管理系统研究

为了对海上石油开采作业中各种设备、管道腐蚀状况进行有效的预测、检测和监测，进行石油设施腐蚀管理系统的研究，并详细阐述了方案的可行性，具有较高的推广价值。     

单晶金刚石在铁基合金中的性态与行为

将金刚石单晶孕镶在Ｆｅ基合金中，在一定条件下烧结，发现金刚石受到明显刻蚀，但晶体结构和强度未变，刻蚀在金刚石与结合剂的界面发生，它是金刚石晶格中的Ｃ原子溶入Ｆｅ，并在其中扩散的过程，适当控制这一扩散过程，将使Ｆｅ基结合剂的金刚石工具获得优良性能。     

Effect of Plasma Etching on Wicking Property of Polypropylene Fiber

Plasma etching technology is used to treat Polypropylene fiber with different fineness. The result shows that the plasma etching treatment is useful to improve the wicking property of polypropylene, although too much time of treatment may be converse to the wicking property. A surface roughness theory is applied to explain the reason why the plasma can improve the wicking property. In this experiment, fibers with different treating time under certain voltage (180 V) and pressure(0.1 mm Hg)are used as experimental sample.     

一种新型低成本的单晶硅表面织构化方法的研究

为了增加单晶硅太阳电池的光谱吸收,提高太阳能电池的光电转换效率,用一种新型的腐蚀剂磷酸钠对单晶硅表面进行织构化研究,分析腐蚀液的浓度、反应时间、反应温度对制备单晶硅太阳能电池绒面的影响,并研究添加剂异丙醇(IPA)对磷酸钠(Na3PO4·12H2O)制绒效果的影响.当磷酸钠的浓度为13%wt,反应温度为85℃,反应时间为25min时能制备出金字塔大小均匀、覆盖致密的绒面,并在400-800nm光谱范围内获得最低反射率12.41%.适量的添加IPA有助于制绒效果的改善,可以使反射率更低.此制绒方法重复性好、价格低廉,是一种很有前景的制绒方法,可以进行大面积生产.