High-energy ion treatments of amorphous As40Se60 thin films for optical applic ations

The treatment of 100 MeV Ag swift-heavy ion(SHI) irradiation with five different fluences(3 1010, 1 1011, 3 1011, 1 1012, and3 1012ions/cm2) was used to design optical and structural properties of amorphous(a-) As40Se60 chalcogenide thin films. Swanepoel method was applied on transmission measurements to determine the changes in optical bandgap, Tauc parameter and linear optical parameters, i.e., linear optical absorption, extinction coefficient and linear refractive index. Dispersion of the material was determined by Wemple–DiDomenico relation.Changes in nonlinear optical parameters of third-order optical susceptibility and nonlinear refractive index were determined using semi-empirical relations. Changes in surface morphology of the films were investigated using SEM observation, which indicated that fluence 3 1012ions/cm2was upper threshold limit for these films for ion treatment. It is observed that optical bandgap reduces from 1.76 eV to 1.64 eV, and nonlinear refractive index increases from 1.31 10 10[esu] to 1.74 10 10[esu]. Linear refractive index initially increases from 2.80 to 3.52(for fluence3 1010ions/cm2) and then keeps decreasing. The observed changes in optical properties upon irradiation were explained in terms of structural rearrangements by Raman measurement. The study was compiled with the previous literature to propose SHI as an effective optical engineering technique to achieve desired changes according to the need of optical/photonic applications.     

阳极Ta/Ta2O5的薄膜曲界面结构特征及形成机理

采用电化学方法制备了钽电解电容器阳极.通过场发射扫描电镜和理论分析对钽阳极断面的曲面结构特征及其形成机理进行了研究.研究结果发现Ta/Ta_2O_5的薄膜曲界面存在间隙层(1nm),该间隙层为氧空位及其缺陷离子迁移所致;曲面结构的应力模型表明曲面薄膜界面的电化学生长过程生产缺陷浓度高于平面系统,讨论了钽电解电容器曲面薄膜的形成过程对电场应力畸变屏蔽的机理.     

氩气分压与膜厚对溅射Al膜微结构及应力的影响

在不同氩气分压下,用直流溅射法在室温Si基片上制备了不同厚度的Al膜。用光学干涉相移法和X射线衍射技术,对薄膜应力和微结构进行了测试分析。微结构分析表明:制备的Al膜均呈多晶状态,晶体结构仍为面心立方;氩气分压分别为1Pa和3Pa的Al膜相比,1Pa下制备的薄膜结晶程度明显优于3Pa下制备的薄膜。1Pa下Al膜平均晶粒尺寸随膜厚的增加由17.9nm逐渐增大到26.3nm;晶格常数由0.4037nm增大到0.4047nm,均比标准值0.40496nm稍小。应力分析表明:同一工作气体压强(氩气分压)下,Al膜的平均应力随着膜厚的增加变小,应力分布趋向均匀。相同时间1Pa和3Pa的Al膜,其微结构和应力有较大差别。     

无氢类金刚石膜的光致发光特性研究

使用脉冲激光沉积（PLD）技术制备了系列无氢类金刚石（DLC）薄膜,测量了样品的Raman光谱、光吸收和光致发光,研究了光致发光与制备条件的依赖关系。结果表明,这种薄膜是有少量sp^2键和sp^2键组成的非晶碳膜。薄膜的光学带隙在1．68～2.46eV,发光在可见光区呈宽带结构。沉积温度对类金刚石薄膜的结构和发光性质有较大影响。当沉积温度从室温升高至400℃时,sp^2团簇的长大使C原子的有序度增强,从而导致薄膜的光学带隙变窄,发光峰红移且半高宽变小。     

YSZ薄膜的阻抗谱测量及其电学性能的研究

应用４１９２Ａ低频阻抗分析仪测量了不同温度下的ＹＳＺ薄膜的阻抗谱,利用Ｂａｕｅｒｌｅ等效电路模型研究了ＹＳＺ薄膜的电导率随温度的变化规律,探讨了掺杂氧化物（Ｙ２Ｏ３）对ＹＳＺ薄膜电导率的影响,其结果表明：ＹＳＺ薄膜的阻抗谱是一个完整的半圆,圆心稍低于实轴,在５００℃时,ＹＳＺ薄膜的电导率为０．０１４Ω＾－１ｃｍ＾－１,且随着测试温度的升高,ＹＳＺ薄膜的电导率增大,稳定剂浓度对ＹＳＺ薄膜的电导率有显     

有机薄膜电致发光器件的研究进展（综述）

对近几年来有机薄膜电致发光（ＥＬ）器件的研究进展进行了综合评停和分析,有机薄膜ＥＬ器件是近年来国际上研究的一个热点,该器件具有可与集成电路相匹配,直流电压低,发光亮度高,以及它与无机薄膜相比较易实现多色显示等优点。     

具有优良绝缘性能的Ta2O5介质膜

介绍了一种具有优良绝缘性能的Ｔａ２Ｏ５介质膜,它由溅射／阳极氧化二步法工艺制备而成。用原子力显微镜对Ｔａ２Ｏ５膜进行了表面形貌分析,对它的电特性进行了测试,并与溅射Ｔａ２Ｏ５膜和阳极氧化Ｔａ２Ｏ５膜进行了比较。结果表明,溅射／阳极氧化Ｔａ２Ｏ５膜的漏电流比溅ＴＭＤＦＡ２Ｏ５膜和阳极氧化Ｔａ２Ｏ５膜分别减少了３－４和１－２个数量级,击穿场强也远高于后２种膜。     

Correlation between structure and hardness of magnetron sputtering deposited CNx films

Carbon nitride films are deposited on Si (001) substrates by reactive dc magnetron sputtering graphite in a pure N2 discharge. The structure of carbon nitride films has been probed using Fourier transformation infrared, near edge X-ray absorption fine structure (NEXAFS) and high resolution electron microscopy (HREM), and the hardness has been evaluated in nanoin-dentation experiments. FTIR spectra show that N atoms are bound to sp1, sp2, and sp3 hybridized C atoms. C1s NEXAFS spectra show that the intensity of π* resonance is the lowest for the film grown at substrate temperature TS = 350℃, with a turbostratic-like structure and high hardness, while it is the highest for the film grown at TS = 100℃, with an amorphous structure and low hardness. The correlation between the structure and hardness of carbon nitride films has been discussed.     

氧浓度和衬底温度对透明导电Cd2SnO4薄膜光学性质的影响

采用射频溅射方法在Ａｒ＋Ｏ２气氛中制备了Ｃｄ２ＳｎＯ４（ＣＴＯ）透明导电薄膜,报道了在不同氧浓度和衬底温度下该膜的透射率、消光系数和折射率随波长变化的情况。研究发现：氧浓度越高,衬底温度越高,则薄膜透射率、折射率越大,而消光系数越低。对这些结果,从ＣＴＯ膜的晶格九,氧空位等角度进行了理论分析。     

直流偏磁场对三类硬磁畴畴壁长度的影响

在不同的直流偏磁场Ｈｂ下,测量了石榴石磁泡膜中三类硬磁畴长度（Ｌ）、宽度（Ｗ）和泡径（ｄ）．从而得到Ｌ、Ｗ和ｄ随Ｈｂ变化的曲线．结果表明,三类硬磁畴的畴壁长度都随Ｈｂ的增加而缩短．这些实验结果可为进一步的理论探讨提供实验依据