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高精度步进压印机热误差的建模分析 总被引:1,自引:0,他引:1
为了消除由紫外光曝光所引起的步进压印机的热误差,以提高压印机的套刻对准精度,运用逐步回归分析法选取了压印机上温度测量点的数量,将压印机上布置的温度传感器从15个减少到6个,并建立了压印机温度测量关键点处的温度与压头在x、z方向热误差关系的数学模型.实验结果与模型计算结果的对比分析表明,模型的热误差预测精度在x方向可以达到899/6,而在z方向可以达到939/6.应用表明,该方法是一种在压印机热误差建模中选择温度测量关键点的有效方法,可避免热误差建模过程中的变量耦合问题,从而提高了模型的精确性. 相似文献
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针对目前微电子机械系统(MEMS)制造中存在的三维加工能力不足的问题,将压印光刻技术和分层制造原理相结合,研究了三维MEMS制造的新工艺.采用视频图像原理构建了多层压印的对正系统,对正精度达到2μm.通过降低黏度和固化收缩率,兼顾弹性和固化速度,开发了适用于微压印工艺的高分辨率抗蚀剂材料,并进行了匀胶、压印和脱模工艺的优化实验.通过原子力显微镜对压印结果进行了分析,分析结果表明,图形从模具到抗蚀剂的转移误差小于8%,具有制作复杂微结构的能力,同时也为MEMS的制作提供了一种高效低成本的新方法. 相似文献
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Development ofPostgraduate Education There were only postgraduates were honored master degree from the year to in old China. While after the establishment of new China the postgraduate educationhas developed in a certain degree there were postgraduates were enrolled from to there were no postgraduates during the period of to due to the"culture revolution".…… 《广西师范大学学报(自然科学版)》2003,21(Z1):231-232
1 Development of Postgraduate Education
There were only 200 postgraduates were honored master degree from the year 1935 to 1949 in old China. While, after the establishment of new China, the postgraduate education has developed in a certain degree, there were 23,000 postgraduates were enrolled from 1950 to 1965, and there were no postgraduates during the period of 1966 to 1977 due to the "culture revolution". 相似文献
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In modernindustry thin film on the substratc has much important role to decide the properties ofproduct especially for electrical optical wear-resistant etc production. There aresome technical methods to prepare thin film including plasma spray physical vapordeposition 《广西师范大学学报(自然科学版)》2003,21(Z4):284-285
In modern industry,thin film on the substratc has much important role to decide the properties of product, especially for electrical, optical and wear-resistant etc, production. There are some technical methods to prepare thin film,including plasma spray,physical vapor deposition (PVD),chemical vapor deposition (CVD) and sol-gel,etc. Among of them,sol-gel method has been developed a popular tech nique for preparing thin films. 相似文献
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介绍了一个外贸信息网络管理系统的总体拓扑结构和功能结构,着重介绍了系统在设计和实现中采用的关键技术.关键技术包括:信息处理自动化;软件开发工具及多窗口技术等. 相似文献
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Five advanced high-strength transformation-induced plasticity(TRIP) steels with different chemical compositions were studied to correlate the retained austenite and nonmetallic inclusion content with their physical properties and the characteristics of the resistance spot welding nuggets. Electrical and thermal properties and equilibrium phases of TRIP steels were predicted using the JMatPro? software. Retained austenite and nonmetallic inclusions were quantified by X-ray diffraction and saturation magnetization techniques. The nonmetallic inclusions were characterized by scanning electron microscopy. The results show that the contents of Si, C, Al, and Mn in TRIP steels increase both the retained austenite and the nonmetallic inclusion contents. We found that nonmetallic inclusions affect the thermal and electrical properties of the TRIP steels and that the differences between these properties tend to result in different cooling rates during the welding process. The results are discussed in terms of the electrical and thermal properties determined from the chemical composition and their impact on the resistance spot welding nuggets. 相似文献
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Cdk1 is sufficient to drive the mammalian cell cycle 总被引:1,自引:0,他引:1
Santamaría D Barrière C Cerqueira A Hunt S Tardy C Newton K Cáceres JF Dubus P Malumbres M Barbacid M 《Nature》2007,448(7155):811-815
10.
Aeschlimann M Bauer M Bayer D Brixner T García de Abajo FJ Pfeiffer W Rohmer M Spindler C Steeb F 《Nature》2007,446(7133):301-304
Adaptive shaping of the phase and amplitude of femtosecond laser pulses has been developed into an efficient tool for the directed manipulation of interference phenomena, thus providing coherent control over various quantum-mechanical systems. Temporal resolution in the femtosecond or even attosecond range has been demonstrated, but spatial resolution is limited by diffraction to approximately half the wavelength of the light field (that is, several hundred nanometres). Theory has indicated that the spatial limitation to coherent control can be overcome with the illumination of nanostructures: the spatial near-field distribution was shown to depend on the linear chirp of an irradiating laser pulse. An extension of this idea to adaptive control, combining multiparameter pulse shaping with a learning algorithm, demonstrated the generation of user-specified optical near-field distributions in an optimal and flexible fashion. Shaping of the polarization of the laser pulse provides a particularly efficient and versatile nano-optical manipulation method. Here we demonstrate the feasibility of this concept experimentally, by tailoring the optical near field in the vicinity of silver nanostructures through adaptive polarization shaping of femtosecond laser pulses and then probing the lateral field distribution by two-photon photoemission electron microscopy. In this combination of adaptive control and nano-optics, we achieve subwavelength dynamic localization of electromagnetic intensity on the nanometre scale and thus overcome the spatial restrictions of conventional optics. This experimental realization of theoretical suggestions opens a number of perspectives in coherent control, nano-optics, nonlinear spectroscopy, and other research fields in which optical investigations are carried out with spatial or temporal resolution. 相似文献