无电极光助化学腐蚀法制备GaN微/纳米结构及其物性研究

利用K2S2O8作为氧化剂,通过无电极光助化学腐蚀GaN外延层制备多种形貌的GaN微米/纳米结构.采用扫描电子显微镜(SEM)、阴极射线发光图(CL mapping)、高分辨X射线衍射(HRXRD)、拉曼光谱(Raman spectra)和光致发光谱(PL)等先进的表征手段研究腐蚀样品的形貌、晶体结构和光学性质.结果表明:在高浓度的KOH(1 mol/L)和低强度的紫外光照下,腐蚀出高质量的腐蚀坑、微米/纳米柱和纳米线;在低浓度KOH(0.4 mol/L)和高强度的紫外光照下,制备出GaN棱锥,研究发现此微米/纳米锥体阵列为包裹了位错的GaN晶体.在腐蚀液KOH浓度低至0.1 mol/L时,GaN腐蚀样品表面形成大量的晶须,聚集成束,晶须揭露了位错;并探讨了多形貌微米/纳米GaN的形成机理.腐蚀温度和GaN外延层极性对腐蚀形貌也具有明显的影响.     

二氧化锗纳米线的制备与喇曼光谱

以Au作催化剂通过在空气中将金属锗加热到550～800℃,在单质锗表面原位大面积生长出了GeO2纳米线.采用扫描电镜和激光喇曼光谱对产物进行了表征分析.结果表明,GeO2纳米线为六方相结构,长度可达30 μm.通过改变加热温度,纳米线的直径可在110～170nm 范围内调节.提出了可能的生长机理以说明GeO2纳米线的形成.并且在GeO2纳米线的喇曼光谱中观察到了声子限制效应.     

基于无催化剂化学气相沉积法的氮化镓纳米线制备和表征

采用化学气相沉积法，通过金属镓和氨气的直接反应，在石英衬底上沉积出GaN纳米线。利用 XRD和SEM对制备的 GaN 纳米线进行了结构和形貌的表征。结果表明合成的GaN纳米线为六方纤锌矿结构，直径为100~200 nm，长度达几微米，GaN纳米线的生长符合VLS生长模型。室温PL光谱表明GaN纳米线在395 nm和566 nm的发光峰主要与Ga空位或者N空位引起的缺陷能级相关。     

ZnO微纳米结构的制备及其光学性能

在没有催化剂的情况下,空气中直接加热氧化锌片成功制备出ZnO纳米线/纳米片.通过改变反应温度,分别能够获得紧密排列的ZnO纳米线和纳米片.ZnO纳米线和纳米片的直径为几个微米,厚度约为280 nm.室温光致发光测试研究表明其最大可见发射波长在508 nm.该研究工作为纳米器件研制提供了一种简单直接氧化方法,可望高产率制备高质量半导体纳米线和纳米片阵列.     

SiO_x纳米线的热蒸发法制备及表征

采用活性炭还原SnO2粉末得到的金属锡作为催化剂,在硅片上生长出SiOx(x在1～2之间)纳米线.分析900℃～1 100℃下生长出来的SiOx纳米线发现,温度越高,纳米线越密集,表面也更光滑;分析不同温度梯度下生长出来的纳米线表明,硅片上温度梯度越小,生长的纳米线分布越均匀,直径也越均匀.并结合实验条件对SiOx纳米线的生长机理进行初步探讨.     

单晶硅表面电化学方法制备定向硅纳米线阵列的研究

采用电化学方法在近室温条件下快速制备硅纳米线阵列.实验选用HF-AgNO3混合溶液,在单晶硅表面沉积生长一层薄的金属银的催化剂薄膜.然后在HF-Fe(NO3)3混合溶液中,利用银为催化剂,在硅片表面发生氧化还原反应,通过选择性腐蚀,制备出大面积硅纳米线阵列;利用扫描电镜分析了制备温度、时间及AgNO3的浓度对催化剂形状、大小的影响,并进一步分析了其对纳米线的定向特征、长度及填充率的影响.在本实验条件下,银催化剂的颗粒直径影响纳米线的生长,过大或过小的催化剂都不利于纳米线的制备.同时,纳米线的长度随着刻蚀生长时间的延长而增加.     

制备参数对ZnO纳米线阵列特性的影响

针对目前水热法制备ZnO纳米线生长机制及成核过程中存在的一些模糊问题,利用水热法制备了一维ZnO纳米线阵列,研究了ZnO纳米线生长过程中反应液浓度、生长时间、反应压力、退火条件等实验参数对ZnO纳米线阵列的形貌、微结构及光电特性的影响,讨论了纳米线生长的成核机制及生长机理.研究结果对制备高质量一维ZnO半导体纳米线阵列并将其应用于微纳及光电子器件领域都有一定的参考价值.     

单源化学气相沉积法制备In2O3纳米线

以乙酰丙酮合铟[In（acac）3]（acac=acetylacetonate）作为单源前驱体,Au为催化剂,采用化学气相沉积法,于较低温度（550℃）下成功制得了In2O3纳米线．用X射线粉末衍射（XRD）、扫描电镜（SEM）、透射电镜（TEM）和能量分散光谱（EDS）对In2O3纳米线进行了表征;制得的In2O3纳米线具有单晶结构,平均直径约为80nm,长度达十几微米,其生长服从气一液一固机理．光致发光研究发现,In2O3纳米线在483nm处有一个强的发射峰,这可归因于氧空位的存在．     

两步法工艺制备GaN纳米晶

采用先在Si(111)衬底上磁控溅射制备Ga2O3,然后在氨气气氛中退火氨化的方法制备了一维GaN纳米晶结构.通过对不同温度下氨化生长的GAN纳米晶的扫描电子显微镜(SEM)观察,确定了氨化生长一维GaN纳米晶的最佳制备温度为950℃.用X射线衍射(XRD)分析了硅片上的纳米晶成分,并用高分辨电镜(HRTEM)观察了该实验条件下生长的一维GaN纳米晶的微观结构.     

高产率合成银纳米线及提升太阳电池银浆性能

高长径比的银纳米线相比于银颗粒具有优异的一维长距离电子传输优势,可以减少电子传输过程中的损失。采用一步水热法制备出大规模高产率的银纳米线。生长的银纳米线平均长度为62.7μm,平均直径为25.0 nm,长径比高达2 508;研究了反应时间以及聚乙烯吡咯烷酮添加量对银纳米线生长的影响,提出了银纳米线的生长机理。最后,将银纳米线以不同比例与商业化银浆进行掺混,并在P型硅片上制备银栅线。测试表明,适量地掺入银纳米线有助于显著提升银栅线导电和抗拉性能。     

Fabrication and photoluminescence of GaN nanowires prepared by ammoniating Ga_2O_3/BN films on Si substrate

GaN has been considered to be the most promising optoelectronic material for such applications as light emitting diodes (LEDs), laser diodes (LDs) as well as high power electronic devices, due to its large direct energy band gap of 3.39 eV at room tempera…     

Fabrication and photoluminescence of GaN nanowires prepared by ammoniating GaeO3/BN films on Si substrate

GaN nanowires were successfully prepared on Si（111） substrate through ammoniating Ga203/BN films deposited by radio frequency magnetron sputtering system. The synthesized nanowires were confirmed as hexagonal wurtzite GaN by X-ray diffraction, selected-area electron diffraction and Fourier transform infrared spectra. Scanning electron microscopy and transmission electron microscopy revealed that the grown GaN nanowires have a smooth and clean surface with diameters ranging from 40 to 160 nm and lengths typically up to several tens of micrometers. The representative photoluminescence spectrum at room temperature exhibited a strong UV light emission band centered at 363 nm and a relative weak purple light emission peak at 422 nm. The growth mechanism is discussed briefly.     

TiO2-assisted GaN-nanowire-based stable ultraviolet photoelectrochemical detection

Ultraviolet photodetection plays an important role in optical communication and chemical- and bio- related sensing applications. Gallium nitride (GaN) nanowires-based photoelectrochemical-type photodetectors, which operate particularly in acqueous conditions, have been attracted extensive interest because of their low cost, fast photoresponse, and excellent responsivity. However, GaN nanowires, which have a large surface-to-volume ratio, suffer suffered from instability in photoelectrochemical environments because of photocorrosion. In this study, the structural and photoelectrochemical properties of GaN nanowires with improved photoresponse and chemical stability obtained by coating the nanowire surface with an ultrathin TiO₂ protective layer were investigated. The photocurrent density of TiO₂-coated GaN nanowires changed minimally over a relatively long operation time of 2000 s under 365-nm illumination. Meanwhile, the attenuation coefficient of the photocurrent density could be reduced to 49%, whereas it is as high as 85% in uncoated GaN nanowires. Furthermore, the photoelectrochemical behavior of the nanowires was investigated through electrochemical impedance spectroscopy measurements. The results shed light on the construction of long-term-stable GaN-nanowire-based photoelectrochemical-type photodetectors.     

Si纳米线的气-液-固生长与结构表征

以Au膜作金属催化剂、SiH4作为源气体,基于气-液-固(VLS)生长机制在n-Si(111)单晶衬底上制备出了Si纳米线.利用扫描电子显微镜对样品进行了结构表征,Si纳米线的直径为20～200 nm、长度为数微米到数十微米,X射线能量损失谱分析表明所制备的Si纳米线中含有少量的Au元素.讨论了生长温度、SiH_4流量、Au膜层厚度和生长时间对Si纳米线的形成与结构的影响.     

The influence of the surface migration of gold on the growth of silicon nanowires

Interest in nanowires continues to grow, fuelled in part by applications in nanotechnology. The ability to engineer nanowire properties makes them especially promising in nanoelectronics. Most silicon nanowires are grown using the vapour-liquid-solid (VLS) mechanism, in which the nanowire grows from a gold/silicon catalyst droplet during silicon chemical vapour deposition. Despite over 40 years of study, many aspects of VLS growth are not well understood. For example, in the conventional picture the catalyst droplet does not change during growth, and the nanowire sidewalls consist of clean silicon facets. Here we demonstrate that these assumptions are false for silicon nanowires grown on Si(111) under conditions where all of the experimental parameters (surface structure, gas cleanliness, and background contaminants) are carefully controlled. We show that gold diffusion during growth determines the length, shape, and sidewall properties of the nanowires. Gold from the catalyst droplets wets the nanowire sidewalls, eventually consuming the droplets and terminating VLS growth. Gold diffusion from the smaller droplets to the larger ones (Ostwald ripening) leads to nanowire diameters that change during growth. These results show that the silicon nanowire growth is fundamentally limited by gold diffusion: smooth, arbitrarily long nanowires cannot be grown without eliminating gold migration.     

MOCVD GaN/InN/GaN量子阱的应变表征

采用MOCVD外延生长11周期InN/GaN量子阱结构样品,原子力显微镜表面形貌结果显示实现了台阶流动生长模式.通过高分辨率X射线衍射与掠入射X射线反射谱技术获得了阱层与垒层的实际厚度.从(102)非对称衍射面与(002)对称衍射面的倒异空间图,确认了InN阱层处于与GaN共格生长的完全应变状态,获得了GaN缓冲层的晶体质量信息及其c轴与a轴晶格常数,确认外延层因受衬底热失配的影响处于压应变状态.     

Effect of reactor pressure on the growth rate and structural properties of GaN films

The effect of reactor pressure on the growth rate, surface morphology and crystalline quality of GaN films grown on sapphire by metalorganic chemical vapor deposition is studied. The results show that as the reactor pressure increases from 2500 to 20000 Pa, the GaN surface becomes rough and the growth rate of GaN films decreases. The rough surface morphology is associated with the initial high temperature GaN islands, which are large with low density due to low adatom surface diffusion under high reactor pressure. These islands prolong the occurrence of 2D growth mode and decrease the growth rate of GaN film. Meanwhile, the large GaN islands with low density lead to the reduction of threading dislocation density during subsequent island growth and coalescence, and consequently decrease the full width at half maximum of X-ray rocking curve of the GaN film.     

Effect of strain on space charge layer in GaN nanowires investigated by in-situ off-axis electron holography

Effect of strain on space charge (SC) layer in nanowires (NWs) has been examined by in situ off-axis electron holography, where GaN NWs attach to an Au electrode inside a transmission electron microscope (TEM). Based on the phase image reconstructed from the complex hologram, the width of SC layer in a strained GaN NW is significantly reduced to about 60 nm, comparing to the 85 nm of the unstrained NW. About 29% reduction of the SC layer in the strained GaN NW resulted from significant decrease of electrons flowed from the GaN into Au. First principle calculations show that the strain reduced bandgap of GaN, narrowing the difference between GaN NW and Au electrode in Fermi level.     

金催化合成硫化锌纳米线及其发光性质的研究

采用金催化和直接蒸发ZnS粉末的方法,合成出大量具有纤锌矿结构的单晶ZnS纳米线。该纳米线的线径均匀,线形规则,直径在80~120 nm,长度约几十微米。研究发现纳米线的形貌对合成的温度很敏感,合成温度的升高会导致纳米线直径的迅速增加。单根纳米线EDS分析表明,ZnS纳米线线体中均匀分布着Au元素,Au元素的掺入是纳米线生长形成后由端部颗粒通过固态扩散进入纳米线中。室温光致发光谱显示:ZnS纳米线有两个发光峰,分别位于446 nm和520 nm处。446 nm的发光峰是由缺陷所致,而520 nm左右的发光峰是由Au元素掺杂所致。