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1.
设计了一种基于AD7745芯片的数字式的电容微位移传感器,采用屏蔽电缆和电容保护环技术,有效降低杂散电容的影响。采用数据滤波技术对采样数据进行处理,提高了测量的准确性和重复性。实验结果表明:该电容微位移传感器的分辨力为0.01μm,全量程线性度0.05%,性能较传统电容位移传感器有较大提高。  相似文献   

2.
微机电系统(MEMS)又称微系统或微电子机械系统,是在微电子技术基础上发展起来的一种高科技微型器件或系统。MEMS集光刻、腐蚀、LIGA、硅和非硅表面微加工、精密机械加工等技术于一体,其尺寸在微米量级。利用微加工技术生产的微传感器以结构简单、灵敏度高和工作稳定等特点而广泛应用于工程实际中。微传感器通常采用静电激励与电容检测方法检测信号,即利用谐振梁振动时的位移变化导致电极之间的距离变化,从而使电极之间的电容值产生变化,检测到的电容变化频率即为谐振梁振动的频率。为解决微传感器电容检测信号微弱、检测精度较低的问题,提出了一种十字型微谐振梁。为研究微谐振梁的多场耦合效应,在考虑范德华力、电场力的情况下建立了谐振子的多场耦合非线性动力学方程。采用林滋泰德-庞加莱法求解获得其非线性振动的动态位移,分析了多物理场参数对于谐振子振动位移平均值以及电容变化量的影响规律。运用微纳加工手段制作出十字型微谐振梁,采用静电激励-电容检测方法进行了谐振频率和振动位移导致的电容变化量测试。结果表明:十字型谐振梁增大了极板面积,电容变化量增加,其信号强度更强。当面积增大75%时,电容变化量为原来的4.2倍,信号强度...  相似文献   

3.
为研制可用于粒子加速器等大科学工程的高精度静力水准传感器,结合国内电容微位移测量技术,完成厚膜陶瓷电容的结构设计。针对参数设计,采用正交实验法和Ansoft Maxwell有限元仿真软件的优化方法,完成了电容传感器的制备及样机的测试。测试实验结果表明传感器具有2.6085%的线性度。  相似文献   

4.
为研制可用于粒子加速器等大科学工程的高精度静力水准传感器,结合国内电容微位移测量技术,完成厚膜陶瓷电容的结构设计。针对参数设计,采用正交实验法和Ansoft Maxwell有限元仿真软件的优化方法,完成了电容传感器的制备及样机的测试。测试实验结果表明传感器具有2.608 5%的线性度。  相似文献   

5.
根据精密摄像系统中摄像头实际安装工况,为了避免传统的点接触测量法的缺点,提出了多电容传感器组合的非接触式镜头埋入深度测量法.采用电容传感器测量,可实现非接触测量,仪器体积小巧,精度高达0.1μm,此外,利用多个传感器对环境敏感而漂移的同向性,抑制了单一传感器数据的漂移,提高了测量的稳定性。克服了单一传感器无法进行形位误差测量的缺陷,标定和现场实验证明了该方法的可行性,系统测量精度达到2μm.  相似文献   

6.
惯性式微动机构位移性能检测   总被引:1,自引:0,他引:1  
微机与电容传感器结合实现了惯性式微动机构位移性能的动静态检测,清晰地分辨出了驱动信号周期为5ms时微位移机构的响应波形.详细推导了测量系统的数学模型、非线性误差的表达式以及极板不平行造成测量误差的理论公式,并给出了误差抑制方法.本文还分析了环境温漂和弹性回复等因素对测量精度的影响.  相似文献   

7.
薄孔壁厚和小孔径测量系统   总被引:5,自引:0,他引:5  
由于相邻孔壁厚度的测量根据进刀量进行计算时精度很低,故提出了一种应用电容传感器对2个微小孔间相邻孔壁进行精密测量的系统.基于非接触式电容测孔传感器,研究了测头的电场边缘效应影响及保护环的宽度选择,设计了电容瞄准测孔传感器的测头对相邻小孔中心定位,利用电容差动测厚传感器测量孔壁,系统由1个瞄准测孔传感器和2个差动测厚传感器及三通道测量电路组成,处理数据后直接显示孔径和孔间壁厚.系统属非接触测量,无需修正测头及工件变形误差,实验证明,测量精度为0.5μm,  相似文献   

8.
涡流传感器具有对介质不敏感、非接触的特点,广泛应用于金属检测中。本文研究一种基于调频式涡流传感器的金属微位移检测电路,采用最小二乘法处理实测数据,探索位移与检测信号的线性关系,实测数据的拟合曲线表明,该电路能在0到4.2 mm小位移内呈现比较好的线性关系。  相似文献   

9.
超精密加工中的微位移技术   总被引:6,自引:0,他引:6  
微位移技术是实现超精密加工的重要途径,据此介绍了微位移的实现方法,并对压电陶瓷微位移机构系统作了进一步的介绍,阐述了系统的组成、工作原理、结构及特点.最后进行了采用MCS-51系列单片机控制的压电陶瓷微位移机构闭环控制系统来提高工件的面形精度的实验.结果表明,工件的面形精度提高了50%以上.  相似文献   

10.
单自由度微位移机构柔性铰链的研究   总被引:4,自引:0,他引:4  
采用正交试验法安排单自由度微位移机构柔性铰链的结构设计参数,运用有限元分析方法,建立该微位移机构的三维实体模型进行仿真计算,取得单自由度微位移机构对应于载荷的位移和应力数据,通过逐步回归分析法建立该微位移机构的位移和应力的数学模型,从而定量地分析柔性铰链结构参数对该微位移机构性能参数的影响.同时,由样机实测得到测量数据,验证了最优回归方程(数学模型)的计算结果.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

14.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

15.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

16.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

17.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

18.
For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the  相似文献   

19.
<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with  相似文献   

20.
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