硅片不同表面钝化工艺的稳定性研究

研究分析了热氧化钝化,用PECVD双面沉积SiNx:H膜钝化以及碘酒钝化三种表面钝化工艺的稳定性,通过WT-2000少子寿命测试仪对采用这三种钝化工艺的单晶硅片,多晶硅片以及物理提纯硅片在暗条件不同储存时间的少子寿命进行测量,分析得到三种表面钝化工艺的效果以及稳定性。研究结果表明:碘酒钝化效果好,用PECVD双面沉积SiNx:H膜钝化和热氧化钝化稳定性好。     

适用于晶体硅太阳能电池的HF/LF-PECVD SiNx:H薄膜的特性研究

介绍了使用HF/LF-PECVD方法制备适用于晶体硅太阳能电池的SiNx:H薄膜.在温度、压强、射频功率和板极间距固定的条件下,通过改变气体流量,制备不同特性的薄膜,并测量薄膜的厚度均匀性、薄膜的折射率和基底的少数载流子寿命的变化,从这三个方面对SiNx:H薄膜的特性进行研究.     

Effects of high temperature annealing on the dislocation density and electrical properties of upgraded metallurgical grade multicrystalline silicon

High temperature annealing was performed on upgraded metallurgical grade multicrystalline silicon (UMG multi-Si) wafers with a purity of 99.999%. The samples were mechanically polished and chemically etched, and then the microstructures were observed by a scanning electron microscope (SEM). The minority carrier lifetime and resistivity of the samples were measured using microwave photoconductance decay and four-point probe techniques, respectively. The results show that the electrical properties of the samples decrease rather than increase as the annealing temperature increases, while the number of dislocations in bulk Si reduced or even disappeared after annealing for 6 hours at 1100–1400°C. It is considered that the structural microdefects induced by the high concentration of metal impurities (including interstitial or substitutional impurities and nanoscale precipitates) determine the minority carrier recombination activity and thus the electrical properties of UMG multi-Si wafers rather than dislocations in bulk Si.     

低能量Ar~+背面轰击对晶体管电流放大系数和特征频率的影响

在制造硅ｎｐｎ型高频、超高频小功率晶体管管芯和形成铝电极后，用低能量氩离子束进行背面轰击，能显著增大晶体管的直、交流电流放大系数，提高特征频率和使击穿特性变硬。实验结果表明，上述参数的改善，是轰击后界面态密度减小和基区少数载流子寿命增长的结果，而且与轰击时间及束流密度有关。     

n/n~ GaAs LPE层中L_P-N_D关系的测量和分析

本文采用等光强表面光伏法对掺锡的n/n~ GaAS液相外延层空穴扩散长度Lp和施主浓度N_D。关系作了测量,求得可供器件设计参考的经验公式.把Lp换算为空穴寿命τ_p后,用公式τ_p~(-1)=τ_(HSP)~(-1) Brn Cn n~2拟合了τ_p和电子浓度n的关系曲线,算出由带隙内复合中心所决定的少子寿命τHSR、带间辐射复合系数Br和带间俄歇复合系数Cn。     

光致开路电压衰减法测量少数载流子的寿命

本文提出了一种测量少数载流子寿命的方法。先将样品做成p~+nn~+或n~+pp~+结,测量光致开路电压的衰减速率,然后用文中导出的理论公式计算少数载流子的寿命。实验结果表明,这种方法能有效地避免表面复合的影响。     

基于少子寿命测量研究晶硅电子态缺陷

基于瞬态微波光电导少子寿命测试仪和MATLAB编程研究了确定硅片的复合中心浓度和陷阱中心浓度的方法。利用瞬态微波光电导少子寿命测试仪,我们测量了硅片的少子寿命及微波光电导瞬态电压信号随时间的变化特性。根据已知的注入水平和相关复合参数,建立少子寿命与复合中心浓度的关系,我们得到硅片中的复合中心浓度。利用瞬态电压信号的时间变化特性与非平衡载流子浓度的时间衰减特性的关系,我们得到非平衡载流子浓度随时间的衰减曲线。结合非平衡载流子时间衰减特性曲线和陷阱模型表达式,利用MATLAB软件进行数值拟合得到了硅片的陷阱中心浓度。     

NaOH溶液浓度对激光刻蚀多晶硅片表面织构的影响

利用扫描电镜表征硅片样品的表面形貌,用光谱仪测试硅片的反射率,并且用少子寿命测试系统测试硅片电学性能,研究了在进行多晶硅太阳能电池表面织构过程中NaOH溶液浓度对其的影响,结果表明:NaOH溶液浓度选择10%时,有效清除多晶硅片表面缺陷的同时,硅片表面织构减反射效果显著,并能兼顾硅片电学性能。     

用开路电压衰减法测量p-n结太阳电池少子寿命的若干问题

本文根据p-n结电容放电理论为采用开路电压衰减法测量太阳电池异常少子寿命提出修正计算公式,分析指出,电池光致注入与电致注入少于寿命不同是由于p-n结基区少于寿命中的有效分量不同造成的。此外,还讨论了电致注入少子寿命测量技术。     

砷化镓光导开关中电流丝的自发辐射效应

应用统计物理方法研究了高增益砷化镓光导开关中电流丝的自发辐射效应.导出了高增益砷化镓光导开关中电流丝的自发辐射规律,在砷化镓样品中引入复合辐射强度与辐射的波长分布函数的概念,近似确定了高增益砷化镓光导开关中电流丝的平均辐射复合系数为(883 nm)≈0.1125,导出了各辐射波长的辐射复合系数与平均辐射复合系数之间的关系,验证了峰值波长为890 nm的光输出能量与实验观察结果吻合,在理论上揭示了电流丝顶部的光生载流子密度的分布规律.结果表明:电流丝的体积面积比值和电流丝内平均载流子密度是影响电流丝辐射效应的两个主要因素,波长876 nm的辐射在紧邻电流丝顶部产生的最大载流子密度具有主导作用,最大光生载流子密度比电流丝内平均载流子密度小1–2个数量级.     

电力半导体器件体内诸物理量对正向电压衰减曲线尾部的影响

本文主要研究不同结构工艺参数的电力半导体器件,其体内扩散电流、空间电荷区复合电流、势垒电容、扩散电容、渡越电容诸物理量对正向电压衰减曲线尾部的影响及其变化规律。为进一步研究衰减曲线的变化规律和测试电力半导体器件在不同注入水平下的载流子寿命值,提供了理论依据。     

缓冲层对p-a-Si/n-c-Si异质结太阳电池影响的计算分析

采用AFORS-HET和MATLAB从理论上研究了缓冲层对HIT电池性能的影响机理.首先对P层进行优化,发现高掺杂、薄厚度的P层有利于电池效率的提升.缓冲层主要的影响有两方面,一是界面态密度,二是与晶体硅形成能带失配.模拟发现,界面态增大导致复合中心密度上升,开路电压下降;能带失配的增大可以降低界面处少子浓度,起到场钝化效果,提高开路电压.短路电流和填充因子受到界面处的影响较小,与P层的工艺条件有比较大的关系.     

用开路电压法测晶体硅太阳电池少子寿命的研究

根据太阳电池的工作原理,详细论述了用脉冲光源照射n/p结太阳电池瞬间时,由于光电压,即开路电压的建立,将有电子从n区通过n/p结向p区边界注入,这些注入p区的过剩电子(少子)在运动中复合所需的时间,我们定义为少子寿命.理论上给出了注入p区的电子复合带来的开路电压与寿命的关系式(Voc(t)),同时也研究了n/p结势垒电容放电对Voc(t)的影响.因此建议使用开路电压随时间的衰减关系式(Voc(t))测量少子寿命的方法.     

多晶硅发射极晶体管的数值分析及模拟

通过对多晶硅发射极晶体管（ＰＥＴ）的多晶硅及界面层导电特性的分析， 得到单晶发射区边界上电流密度与少子浓度之间的关系式，并以此为自洽的 边界条件，在单晶区数值求解一组描述晶体管电学特性的微分方程，得到晶 体管内部电势分布和载流子分布以及ＰＥＴ的端电流特性．     

H+ passivation of poly-si solar cells processed by different annealing processes

The effects of different annealing processes on the photovoltaic (PV) properties and the spectral response as well as minority carrier lifetime in the bulk of unanalyzed PF₅ ion implantation poly-Si solar cells were investigated. The different hydrogen passivation effects of defects in poly-Si induced by three heat treatment processes are reported. We used RTA-rapid thermal annealing, YAG pulse laser annealing and CTSA-classical three-step annealing for this study. The results show that cells processed by RTA (800°C, 4 sec) achieved the best PV properties and spectral response among all annealed samples. Under this precess condition, no or few defects were induced in bulk. While RTA (>-850°C for 4 sec), CTSA as well as YAG laser processes induced defects of different nature and concentration in the bulk of cells. It is further shown that hydrogen ion implantation significantly improved, the performances of poly-Si cells. It is able to efficiently remove the YAG laser induced defects in bulk. However, it cannot completely passivate the defects induced by CTSA and RTA processes. Biography: LI Jin-chai (1946-), male, Associate professor. Research direction: studies of ion beam modification of materials and films of new functionail materials.     

Experimental extraction of an entangled photon pair from two identically decohered pairs

Entanglement is considered to be one of the most important resources in quantum information processing schemes, including teleportation, dense coding and entanglement-based quantum key distribution. Because entanglement cannot be generated by classical communication between distant parties, distribution of entangled particles between them is necessary. During the distribution process, entanglement between the particles is degraded by the decoherence and dissipation processes that result from unavoidable coupling with the environment. Entanglement distillation and concentration schemes are therefore needed to extract pairs with a higher degree of entanglement from these less-entangled pairs; this is accomplished using local operations and classical communication. Here we report an experimental demonstration of extraction of a polarization-entangled photon pair from two decohered photon pairs. Two polarization-entangled photon pairs are generated by spontaneous parametric down-conversion and then distributed through a channel that induces identical phase fluctuations to both pairs; this ensures that no entanglement is available as long as each pair is manipulated individually. Then, through collective local operations and classical communication we extract from the two decohered pairs a photon pair that is observed to be polarization-entangled.     

Superconductor-insulator transition in La2 - xSrxCuO4 at the pair quantum resistance

High-temperature superconductivity in copper oxides arises when a parent insulator compound is doped beyond some critical concentration; what exactly happens at this superconductor-insulator transition is a key open question. The cleanest approach is to tune the carrier density using the electric field effect; for example, it was learned in this way that weak electron localization transforms superconducting SrTiO(3) into a Fermi-glass insulator. But in the copper oxides this has been a long-standing technical challenge, because perfect ultrathin films and huge local fields (>10(9)?V?m(-1)) are needed. Recently, such fields have been obtained using electrolytes or ionic liquids in the electric double-layer transistor configuration. Here we report synthesis of epitaxial films of La(2-?x)Sr(x)CuO(4) that are one unit cell thick, and fabrication of double-layer transistors. Very large fields and induced changes in surface carrier density enable shifts in the critical temperature by up to 30?K. Hundreds of resistance versus temperature and carrier density curves were recorded and shown to collapse onto a single function, as predicted for a two-dimensional superconductor-insulator transition. The observed critical resistance is precisely the quantum resistance for pairs, R(Q) = h/(2e) = 6.45?kΩ, suggestive of a phase transition driven by quantum phase fluctuations, and Cooper pair (de)localization.     

EBIC测定GaP的少子扩散长度和表面复合速度

应用扫描电子显微镜（SEM）对GaP半导体材料的p-n结进行线扫描,得出电子束感生电流（EBIC）的线扫描曲线,给出一简单模型,对GaP样品n区的EBIC线型进行计算,拟合实验曲线,得出少子扩散长度和表面复合速度。     

单层有机发光二极管中电场与载流子密度的分布

建立了单层 (有机发光二极管 )中载流子注入、输运和复合的理论模型 ,通过求解非线性Painleve方程得到了电场强度随坐标变化的解析函数关系式 ,计算并讨论了载流子迁移率对电场强度、载流子密度等的影响。结果表明 :空间电荷分布不均匀造成了电场强度的不均匀分布。当在器件中占主导地位的载流子具有较低的迁移率或少数载流子具有较高的迁移率时 ,有利于载流子的输运与复合 ,发光性能可得到较大提高。     

平带太阳电池的内量子效率

该文对平带同质结太阳电池内各空间区域对内量子效率的贡献,以及总的内量子效率进行了数值计算和分析,发现太阳电池的表面复合速率和各区域宽度均对内量子效率有重要影响.而对绒面结构太阳电池的内量子效率和物理参数关系的理论推导,通过数学变换和高阶近似后所得结果,可归结为与平带同质结相同的形式.不同的是,绒面在显著提高外量子效率的同时,可使电池在中长波范围的内量子效率略有提高,这对于改善太阳电池的光电转换性能起着非常重要的作用.所得结论对设计太阳电池及其表面结构具有指导意义.