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1.
介绍了干涉显微镜测量原理,仪器结构,空间分辨率和测量范围,分析了测量误差产生的原因,通过实验表明,干涉显微镜能够比较真实地反映超光表面微观形貌特征,是超光滑表面微观形貌测量的有效工具。  相似文献   

2.
对移相误差不敏感的四帧相位算法   总被引:2,自引:0,他引:2  
应用相移干涉术测量物体表面微观形貌时,相移器的移相误差直接影响测量精度。在四帧干涉图情形下,推导出了对移相误差不敏感的相位解算方法。算法将相移误差因子作为中间可代换变量,它的大小随机变化不影响相位计算结果,即相位计算式与相移误差因子无关。对标准正弦样板进行的实验验证表明,该算法有效地抑制了移相误差对形貌测量的影响,进一步提高了表面微观形貌的测量精度和测量可靠性、提高了测量系统的整体性能指标。  相似文献   

3.
基于微分相衬方法定量测量表面微观形貌   总被引:1,自引:0,他引:1  
改进了用于定量测量样品表面微观形貌的微分相衬干涉显微镜系统,对系统中由Nomarski棱镜引起的相位差△Φ进行了精确的计算和校正,系统不需要参考表面和机械扫描机构,能有效地抑制机械振动等外界环境干扰对测量结果的影响.并通过建立相应的数学模型推导了系统的点扩展函数.最后用维纳滤波算法恢复了图像,避免了普通逆滤波中的病态问题.  相似文献   

4.
设计了一种实时测量表面形貌的正弦相位调制半导体激光干涉仪,对其抗干扰的实时测量原理进行了分析.在该正弦相位调制干涉仪中,利用高速图像传感器探测干涉信号,该干涉信号通过信号处理电路实时鉴相得到被测表面所对应的相位分布,即可实时获得待测量物体的表面形貌.在实验中,测量了楔形光学平板的表面形貌,测量点为30×30个,测量时间小于10ms,重复测量精度为4.3nm.实验结果表明该正弦相位调制干涉仪的有效性.  相似文献   

5.
介绍一种用于曲面形貌特性的测量-分析系统。在触针技术的基础上,采用激光-光栅干涉和散斑干涉条纹微机细分技术并利用计算机图形学原理,解决高精度曲面表面形貌测量问题,讨论了系统工作原理、光电信号处理、软件设计及曲面数据处理模型,给出了初步实验结果。  相似文献   

6.
介绍一种用于曲面形貌特性的测量-分析系统,在触针技术的基础上,采用激光-光栅干涉和散斑干涉条纹微机细分技术并利用计算机图形学原理,解决高精度曲面表面形貌测量问题,讨论了系统工作原理、光电信号处理、软件设计及曲面数据处理模型,给出了初步实验结果。  相似文献   

7.
基于白光干涉的MEMS三维表面形貌测量   总被引:5,自引:0,他引:5  
利用白光干涉垂直扫描原理,设计了测量微机电系统(MEMS)表面形貌特征的垂直扫描白光干涉系统.该系统由垂直扫描位移工作台驱动被测件,通过检测被测件表面的干涉条纹变化得到表面形貌.垂直扫描位移工作台利用压电陶瓷驱动柔性铰链结构进行纳米驱动,光栅传感器监控整个垂直扫描过程,对压电陶瓷的非线性误差进行实时补偿.垂直扫描位移工作台的性能分析表明:分辨率达到1 nm,定位精度小于10 nm.同时采用图像分析技术对光学仪器测量台阶出现的噪声进行了消噪处理,试验结果表明垂直扫描白光干涉系统能够实现MEMS三维表面形貌的高精度测量.  相似文献   

8.
白光干涉测量技术是光学测量中一种非常重要的方法。介绍了白光干涉测量的原理及系统构成,提出了基于局部峰点插值提取白光干涉信号包络的算法。对局部峰点插值提取包络算法的实现和数据处理的过程进行了讨论,得到了清晰的三维表面形貌图像。  相似文献   

9.
检测微表面形貌的Mirau相移干涉轮廓仪   总被引:1,自引:0,他引:1  
基于Mirau双光束干涉,研制了检测微表面形貌的Mirau相移干涉轮廓仪.柯拉照明提供被测面均匀的照明,干涉成像系统是长工作距无限筒长干涉显微镜结构,由Mirau干涉物镜和镜筒透镜组成.物镜由光焦度较大的正光组和光焦度较小的负光组组成.轮廓仪的放大率为-10,数值孔径为0.3,工作距5mm,视场0.64×0.48mm2,中心遮拦0.129.相移器为电容式闭环控制的压电陶瓷传感器.通过6幅光纤连接器端面的干涉图,经6步相移法得到其表面形貌.实验结果表明,Mirau干涉轮廓仪的横向分辨率为0.875μm,垂直方向的测量范围为5.3μm,重复测量精度为1.7nm.  相似文献   

10.
赖秀娟 《江西科学》2008,26(5):741-744
简述了正弦相位调制干涉法的发展,重点介绍了双光栅正弦相位调制在物体阶梯表面的高度差、物体表面形貌和振动物体表面形貌的等测量领域的应用,并提出了用双光栅正弦相位调制测量振动物体温度的想法。  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

14.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

15.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

16.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

17.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

18.
For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the  相似文献   

19.
Franck-Condon factors bridge the gap between theoretical modeling and experimental observations for molecular electronic spectroscopy and electron transfer.Under the displaced harmonic oscillator approximation,multidimensional Franck-Condon factors are decomposed into a product of many one-dimensional(1D)Franck-Condon(FC)factors,and each 1D-FC factor is associated with one Huang-Rhys factor that determines the leading contribution of  相似文献   

20.
<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with  相似文献   

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